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Fabrication of the patterned flexible OLEDs using a combined roller imprinting and photolithography method

  • Po Ching Kao
  • , Sheng Yuan Chu
  • , Chuan Yi Zhan
  • , Lien Chung Hsu
  • , Wen Chang Liao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new patterning method has been developed to fabricate the patterned organic light emitting devices (OLEDs) with pixels of 500 μm × 300 μm on the flexible PET substrates. The patterns of the pixel array were defined in crossed-strip style with ITO anode patterned using a combination of the roller-type imprinting lithography and photolithography (CRIP), followed by wet chemical etching. Compared with the conventional imprint lithography or photolithography, CRIP using the hybrid mold has the advantages of better uniformity, less force, less time-consuming, lower cost and higher aspect ratio.

Original languageEnglish
Title of host publication2005 5th IEEE Conference on Nanotechnology
PublisherIEEE Computer Society
Pages693-695
Number of pages3
ISBN (Print)0780391993, 9780780391994
DOIs
Publication statusPublished - 2005
Event2005 5th IEEE Conference on Nanotechnology - Nagoya, Japan
Duration: 2005 Jul 112005 Jul 15

Publication series

Name2005 5th IEEE Conference on Nanotechnology
Volume2

Other

Other2005 5th IEEE Conference on Nanotechnology
Country/TerritoryJapan
CityNagoya
Period05-07-1105-07-15

All Science Journal Classification (ASJC) codes

  • General Engineering

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