Fabrication of thin-film spherical anodic alumina oxide templates using a superimposed nano-micro structure

C. K. Chung, K. T. Tu, C. Y. Chang, Y. C. Peng

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

Compared to the single-scale planar anodic aluminum oxide (AAO) film, the multi-scale hierarchical AAO structures can have a better performance due to the larger surface area. The conventional multi-scale AAO structure on a micro-pattern surface was fabricated using time-consuming lithography and etching process at high cost. In this article, the 3D porous AAO films with nanopores of 35–45 nm in diameter have been achieved on the surface of silica micro beads of 2 μm in diameter. The superimposed nano-micro structure was fabricated using hybrid-pulse anodizing the sputtered Al film on beads with a period of negative potential to dissipate Joule heating at room temperature. The 3D AAO-on-beads structure provides a large-surface-area substrate for enhancing the sputtered TiO 2 photocatalysis. The photocatalysis on the superimposed nano-micro structures can exhibit a high performance with the MB concentration of 30% after 15 h photo-degradation.

Original languageEnglish
Pages (from-to)170-175
Number of pages6
JournalSurface and Coatings Technology
Volume361
DOIs
Publication statusPublished - 2019 Mar 15

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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