Fabrication of Vertically Stacked Nanosheet Junctionless Field-Effect Transistors and Applications for the CMOS and CFET Inverters

Po Jung Sung, Shu Wei Chang, Kuo Hsing Kao, Chien Ting Wu, Chun Jung Su, Ta Chun Cho, Fu Kuo Hsueh, Wen Hsi Lee, Yao Jen Lee, Tien Sheng Chao

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37 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds