Fast multiphoton microfabrication of freeform polymer microstructures by spatiotemporal focusing and patterned excitation

Yi Cheng Li, Li Chung Cheng, Chia Yuan Chang, Chi Hsiang Lien, Paul J. Campagnola, Shean Jen Chen

Research output: Contribution to journalArticlepeer-review

44 Citations (Scopus)

Abstract

One of the limits of conventional scanning multiphoton microfabrication is its low throughput due to point-by-point processing. In order to surpass this limita multiphoton microfabrication system based on spatiotemporal focusing and patterned excitation has been developed to quickly provide three-dimensional (3D) freeform polymer microstructures. 3D freeform polymer microstructures using Rose Bengal as the photoinitiator are created by sequentially stacking two-dimensional fabricating patterns. The size of each fabrication area can be larger than 300 × 170 μm2 (full width at half maximum). Compared to conventional scanning multiphoton excitation and fixed mask pattern generationthis approach offers freeform microstructures and a greater than three-order increase in fabrication speed. Furthermorethe system is capable of optically sectioning the fabricated microstructures for providing 3D inspection.

Original languageEnglish
Pages (from-to)19030-19038
Number of pages9
JournalOptics Express
Volume20
Issue number17
DOIs
Publication statusPublished - 2012 Aug 13

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

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