Fast positioning and impact minimizing of mems devices by suppression motion-induced vibration by command shaping method

K. S. Chen; K. S. Ou

doi:10.1109/MEMSYS.2009.4805580

Fast positioning and impact minimizing of mems devices by suppression motion-induced vibration by command shaping method

K. S. Chen, K. S. Ou

Department of Mechanical Engineering

Research output: Contribution to journal › Conference article › peer-review

3 Citations (Scopus)

Abstract

This work presents a command-shaping based scheme for both fast positioning and reducing contact impact ofMEMS devices by suppression motion-induced vibrations. The scheme was developed by applying energy conservation, force equilibrium, and elliptical integrals. Simulink simulations indicated that both of the impact force and settling time can be effectively reduced. Specimen fabricated using Su-8 and a test bed was designed to further demonstrate the performance of the proposed scheme and the test results indicated that the proposed approach can effectively enhance the dynamic performance ofMEMS devices such as RF switches.

Original language	English
Article number	4805580
Pages (from-to)	1103-1106
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805580
Publication status	Published - 2009
Event	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: 2009 Jan 25 → 2009 Jan 29

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2009.4805580

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title = "Fast positioning and impact minimizing of mems devices by suppression motion-induced vibration by command shaping method",

abstract = "This work presents a command-shaping based scheme for both fast positioning and reducing contact impact ofMEMS devices by suppression motion-induced vibrations. The scheme was developed by applying energy conservation, force equilibrium, and elliptical integrals. Simulink simulations indicated that both of the impact force and settling time can be effectively reduced. Specimen fabricated using Su-8 and a test bed was designed to further demonstrate the performance of the proposed scheme and the test results indicated that the proposed approach can effectively enhance the dynamic performance ofMEMS devices such as RF switches.",

author = "Chen, {K. S.} and Ou, {K. S.}",

year = "2009",

doi = "10.1109/MEMSYS.2009.4805580",

language = "English",

pages = "1103--1106",

journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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AU - Chen, K. S.

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AB - This work presents a command-shaping based scheme for both fast positioning and reducing contact impact ofMEMS devices by suppression motion-induced vibrations. The scheme was developed by applying energy conservation, force equilibrium, and elliptical integrals. Simulink simulations indicated that both of the impact force and settling time can be effectively reduced. Specimen fabricated using Su-8 and a test bed was designed to further demonstrate the performance of the proposed scheme and the test results indicated that the proposed approach can effectively enhance the dynamic performance ofMEMS devices such as RF switches.

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JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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Y2 - 25 January 2009 through 29 January 2009

ER -

Fast positioning and impact minimizing of mems devices by suppression motion-induced vibration by command shaping method

Abstract

All Science Journal Classification (ASJC) codes

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