Fast positioning and impact minimizing of mems devices by suppression motion-induced vibration by command shaping method

K. S. Chen, K. S. Ou

Research output: Contribution to journalConference article

3 Citations (Scopus)

Abstract

This work presents a command-shaping based scheme for both fast positioning and reducing contact impact ofMEMS devices by suppression motion-induced vibrations. The scheme was developed by applying energy conservation, force equilibrium, and elliptical integrals. Simulink simulations indicated that both of the impact force and settling time can be effectively reduced. Specimen fabricated using Su-8 and a test bed was designed to further demonstrate the performance of the proposed scheme and the test results indicated that the proposed approach can effectively enhance the dynamic performance ofMEMS devices such as RF switches.

Original languageEnglish
Article number4805580
Pages (from-to)1103-1106
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs
Publication statusPublished - 2009 Jun 1
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: 2009 Jan 252009 Jan 29

Fingerprint

commands
positioning
Energy conservation
Switches
retarding
vibration
test stands
energy conservation
settling
switches
simulation

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

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abstract = "This work presents a command-shaping based scheme for both fast positioning and reducing contact impact ofMEMS devices by suppression motion-induced vibrations. The scheme was developed by applying energy conservation, force equilibrium, and elliptical integrals. Simulink simulations indicated that both of the impact force and settling time can be effectively reduced. Specimen fabricated using Su-8 and a test bed was designed to further demonstrate the performance of the proposed scheme and the test results indicated that the proposed approach can effectively enhance the dynamic performance ofMEMS devices such as RF switches.",
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