Film thickness dependence of the dielectric properties of SrTiO 
                        3
                        /BaTiO
                        3
                         multilayer thin film deposition by double target radio frequency (RF) magnetron sputtering

Wang-Long Li; Moo Chin Wang; Fu Yuan Hsiao; Nan Chung Wu

Film thickness dependence of the dielectric properties of SrTiO ₃ /BaTiO ₃ multilayer thin film deposition by double target radio frequency (RF) magnetron sputtering

Wang-Long Li, Moo Chin Wang, Fu Yuan Hsiao, Nan Chung Wu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Four-layer SrTiO ₃ /BaTiO ₃ thin film (ST/BT) ₄ with various thicknesses deposited on Pt / Ti / SiO ₂ / Si substrates at 500 C by double target radio frequency (RF) magnetron sputtering have been investigated using X-ray diffraction (XRD), profilometry, capacitance-voltage and current-voltage measurements. The XRD pattern reveal the formation of the sputter deposited (ST/BT) ₄ with designed modulation. The dielectric constant of the (ST/BT) ₄ multilayers increases with increasing film thickness. The effects of temperature, frequency, and bias voltage on the dielectric constant of the (ST/BT) ₄ multilayers are discussed in detail.

Original language	English
Title of host publication	A Global Road Map for Ceramic Materials and Technologies
Subtitle of host publication	Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme
Publication status	Published - 2008 Dec 1
Event	2nd International Congress on Ceramics, ICC 2008 - Verona, Italy Duration: 2008 Jun 29 → 2008 Jul 4

Publication series

Name	A Global Road Map for Ceramic Materials and Technologies: Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme

Other

Other	2nd International Congress on Ceramics, ICC 2008
Country/Territory	Italy
City	Verona
Period	08-06-29 → 08-07-04

All Science Journal Classification (ASJC) codes

Ceramics and Composites

Cite this

Li, W-L., Wang, M. C., Hsiao, F. Y., & Wu, N. C. (2008). Film thickness dependence of the dielectric properties of SrTiO ₃ /BaTiO ₃ multilayer thin film deposition by double target radio frequency (RF) magnetron sputtering In A Global Road Map for Ceramic Materials and Technologies: Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme (A Global Road Map for Ceramic Materials and Technologies: Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme).

Li, Wang-Long ; Wang, Moo Chin ; Hsiao, Fu Yuan et al. / Film thickness dependence of the dielectric properties of SrTiO ₃ /BaTiO ₃ multilayer thin film deposition by double target radio frequency (RF) magnetron sputtering A Global Road Map for Ceramic Materials and Technologies: Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme. 2008. (A Global Road Map for Ceramic Materials and Technologies: Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme).

@inproceedings{f075c581173646969f8402b94ef2f70d,

title = " Film thickness dependence of the dielectric properties of SrTiO 3 /BaTiO 3 multilayer thin film deposition by double target radio frequency (RF) magnetron sputtering ",

abstract = " Four-layer SrTiO 3 /BaTiO 3 thin film (ST/BT) 4 with various thicknesses deposited on Pt / Ti / SiO 2 / Si substrates at 500 C by double target radio frequency (RF) magnetron sputtering have been investigated using X-ray diffraction (XRD), profilometry, capacitance-voltage and current-voltage measurements. The XRD pattern reveal the formation of the sputter deposited (ST/BT) 4 with designed modulation. The dielectric constant of the (ST/BT) 4 multilayers increases with increasing film thickness. The effects of temperature, frequency, and bias voltage on the dielectric constant of the (ST/BT) 4 multilayers are discussed in detail. ",

author = "Wang-Long Li and Wang, {Moo Chin} and Hsiao, {Fu Yuan} and Wu, {Nan Chung}",

year = "2008",

month = dec,

day = "1",

language = "English",

isbn = "9788880800842",

series = "A Global Road Map for Ceramic Materials and Technologies: Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme",

booktitle = "A Global Road Map for Ceramic Materials and Technologies",

note = "2nd International Congress on Ceramics, ICC 2008 ; Conference date: 29-06-2008 Through 04-07-2008",

}

Li, W-L, Wang, MC, Hsiao, FY & Wu, NC 2008, Film thickness dependence of the dielectric properties of SrTiO ₃ /BaTiO ₃ multilayer thin film deposition by double target radio frequency (RF) magnetron sputtering in A Global Road Map for Ceramic Materials and Technologies: Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme. A Global Road Map for Ceramic Materials and Technologies: Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme, 2nd International Congress on Ceramics, ICC 2008, Verona, Italy, 08-06-29.

Film thickness dependence of the dielectric properties of SrTiO ₃ /BaTiO ₃ multilayer thin film deposition by double target radio frequency (RF) magnetron sputtering . / Li, Wang-Long; Wang, Moo Chin; Hsiao, Fu Yuan et al.

A Global Road Map for Ceramic Materials and Technologies: Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme. 2008. (A Global Road Map for Ceramic Materials and Technologies: Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Film thickness dependence of the dielectric properties of SrTiO 3 /BaTiO 3 multilayer thin film deposition by double target radio frequency (RF) magnetron sputtering

AU - Li, Wang-Long

AU - Wang, Moo Chin

AU - Hsiao, Fu Yuan

AU - Wu, Nan Chung

PY - 2008/12/1

Y1 - 2008/12/1

N2 - Four-layer SrTiO 3 /BaTiO 3 thin film (ST/BT) 4 with various thicknesses deposited on Pt / Ti / SiO 2 / Si substrates at 500 C by double target radio frequency (RF) magnetron sputtering have been investigated using X-ray diffraction (XRD), profilometry, capacitance-voltage and current-voltage measurements. The XRD pattern reveal the formation of the sputter deposited (ST/BT) 4 with designed modulation. The dielectric constant of the (ST/BT) 4 multilayers increases with increasing film thickness. The effects of temperature, frequency, and bias voltage on the dielectric constant of the (ST/BT) 4 multilayers are discussed in detail.

AB - Four-layer SrTiO 3 /BaTiO 3 thin film (ST/BT) 4 with various thicknesses deposited on Pt / Ti / SiO 2 / Si substrates at 500 C by double target radio frequency (RF) magnetron sputtering have been investigated using X-ray diffraction (XRD), profilometry, capacitance-voltage and current-voltage measurements. The XRD pattern reveal the formation of the sputter deposited (ST/BT) 4 with designed modulation. The dielectric constant of the (ST/BT) 4 multilayers increases with increasing film thickness. The effects of temperature, frequency, and bias voltage on the dielectric constant of the (ST/BT) 4 multilayers are discussed in detail.

UR - http://www.scopus.com/inward/record.url?scp=84872127751&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84872127751&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84872127751

SN - 9788880800842

T3 - A Global Road Map for Ceramic Materials and Technologies: Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme

BT - A Global Road Map for Ceramic Materials and Technologies

T2 - 2nd International Congress on Ceramics, ICC 2008

Y2 - 29 June 2008 through 4 July 2008

ER -

Li W-L, Wang MC, Hsiao FY, Wu NC. Film thickness dependence of the dielectric properties of SrTiO ₃ /BaTiO ₃ multilayer thin film deposition by double target radio frequency (RF) magnetron sputtering In A Global Road Map for Ceramic Materials and Technologies: Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme. 2008. (A Global Road Map for Ceramic Materials and Technologies: Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme).