TY - GEN
T1 -
Film thickness dependence of the dielectric properties of SrTiO
3
/BaTiO
3
multilayer thin film deposition by double target radio frequency (RF) magnetron sputtering
AU - Li, Wang-Long
AU - Wang, Moo Chin
AU - Hsiao, Fu Yuan
AU - Wu, Nan Chung
PY - 2008/12/1
Y1 - 2008/12/1
N2 -
Four-layer SrTiO
3
/BaTiO
3
thin film (ST/BT)
4
with various thicknesses deposited on Pt / Ti / SiO
2
/ Si substrates at 500 C by double target radio frequency (RF) magnetron sputtering have been investigated using X-ray diffraction (XRD), profilometry, capacitance-voltage and current-voltage measurements. The XRD pattern reveal the formation of the sputter deposited (ST/BT)
4
with designed modulation. The dielectric constant of the (ST/BT)
4
multilayers increases with increasing film thickness. The effects of temperature, frequency, and bias voltage on the dielectric constant of the (ST/BT)
4
multilayers are discussed in detail.
AB -
Four-layer SrTiO
3
/BaTiO
3
thin film (ST/BT)
4
with various thicknesses deposited on Pt / Ti / SiO
2
/ Si substrates at 500 C by double target radio frequency (RF) magnetron sputtering have been investigated using X-ray diffraction (XRD), profilometry, capacitance-voltage and current-voltage measurements. The XRD pattern reveal the formation of the sputter deposited (ST/BT)
4
with designed modulation. The dielectric constant of the (ST/BT)
4
multilayers increases with increasing film thickness. The effects of temperature, frequency, and bias voltage on the dielectric constant of the (ST/BT)
4
multilayers are discussed in detail.
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UR - http://www.scopus.com/inward/citedby.url?scp=84872127751&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84872127751
SN - 9788880800842
T3 - A Global Road Map for Ceramic Materials and Technologies: Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme
BT - A Global Road Map for Ceramic Materials and Technologies
T2 - 2nd International Congress on Ceramics, ICC 2008
Y2 - 29 June 2008 through 4 July 2008
ER -