Film thickness dependence of the dielectric properties of SrTiO 3 /BaTiO 3 multilayer thin film deposition by double target radio frequency (RF) magnetron sputtering

Wang-Long Li, Moo Chin Wang, Fu Yuan Hsiao, Nan Chung Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Four-layer SrTiO 3 /BaTiO 3 thin film (ST/BT) 4 with various thicknesses deposited on Pt / Ti / SiO 2 / Si substrates at 500 C by double target radio frequency (RF) magnetron sputtering have been investigated using X-ray diffraction (XRD), profilometry, capacitance-voltage and current-voltage measurements. The XRD pattern reveal the formation of the sputter deposited (ST/BT) 4 with designed modulation. The dielectric constant of the (ST/BT) 4 multilayers increases with increasing film thickness. The effects of temperature, frequency, and bias voltage on the dielectric constant of the (ST/BT) 4 multilayers are discussed in detail.

Original languageEnglish
Title of host publicationA Global Road Map for Ceramic Materials and Technologies
Subtitle of host publicationForecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme
Publication statusPublished - 2008 Dec 1
Event2nd International Congress on Ceramics, ICC 2008 - Verona, Italy
Duration: 2008 Jun 292008 Jul 4

Publication series

NameA Global Road Map for Ceramic Materials and Technologies: Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme

Other

Other2nd International Congress on Ceramics, ICC 2008
CountryItaly
CityVerona
Period08-06-2908-07-04

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites

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    Li, W-L., Wang, M. C., Hsiao, F. Y., & Wu, N. C. (2008). Film thickness dependence of the dielectric properties of SrTiO 3 /BaTiO 3 multilayer thin film deposition by double target radio frequency (RF) magnetron sputtering In A Global Road Map for Ceramic Materials and Technologies: Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme (A Global Road Map for Ceramic Materials and Technologies: Forecasting the Future of Ceramics, International Ceramic Federation - 2nd International Congress on Ceramics, ICC 2008, Final Programme).