First Demonstration of Heterogeneous IGZO/Si CFET Monolithic 3-D Integration with Dual Work Function Gate for Ultralow-Power SRAM and RF Applications

Shu Wei Chang, Tsung Han Lu, Cong Yi Yang, Cheng Jui Yeh, Min Kun Huang, Ching Fan Meng, Po Jen Chen, Ting Hsuan Chang, Yan Shiuan Chang, Jhe Wei Jhu, Tzu Chieh Hong, Chu Chu Ke, Xin Ren Yu, Wen Hsiang Lu, Mohammed Aftab Baig, Ta Chun Cho, Po Jung Sung, Chun Jung Su, Fu Kuo Hsueh, Bo Yuan ChenHsin Hui Hu, Chien Ting Wu, Kun Lin Lin, William Cheng Yu Ma, Darsen D. Lu, Kuo Hsing Kao, Yao Jen Lee, Cheng Li Lin, Kun Ping Huang, Kun Ming Chen, Yiming Li, Seiji Samukawa, Tien Sheng Chao, Guo Wei Huang, Wen Fa Wu, Wen Hsi Lee, Jiun Yun Li, Jia Min Shieh, Jenn Hwan Tarng, Yeong Her Wang, Wen Kuan Yeh

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