First Demonstration of Vertical Stacked Hetero-Oriented n-Ge (111)/p-Ge (100) CFET toward Mobility Balance Engineering

X. R. Yu, W. H. Chang, T. C. Hong, P. J. Sung, A. Agarwal, G. L. Luo, C. T. Wu, K. H. Kao, C. J. Su, S. W. Chang, W. H. Lu, P. Y. Fu, J. H. Lin, P. H. Wu, T. C. Cho, W. C.Yu Ma, D. D. Lu, T. S. Chao, T. Maeda, Y. J. LeeW. F. Wu, W. K. Yeh, Y. H. Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

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Engineering & Materials Science