TY - JOUR
T1 - Formaldehyde sensing characteristics of a nio-based sensor decorated with Pd nanoparticles and a Pd Thin film
AU - Chen, Huey Ing
AU - Hsiao, Cheng Yu
AU - Chen, Wei Cheng
AU - Chang, Ching Hong
AU - Liu, I. Ping
AU - Chou, Tzu Chieh
AU - Liu, Wen Chau
N1 - Funding Information:
Manuscript received December 17, 2017; revised March 19, 2018; accepted March 21, 2018. Date of publication April 2, 2018; date of current version April 20, 2018. This work was supported in part by the Ministry of Science and Technology of the Republic of China under Contract NSC-100-2221-E-006-244-MY3 and in part by the Advanced Optoelectronic Technology Center, National Cheng Kung University. The review of this paper was arranged by Editor A. Bermak. (Corresponding author: Wen-Chau Liu.) H.-I. Chen and I.-P. Liu are with the Department of Chemical Engineering, National Cheng-Kung University, Tainan, Taiwan 70101, China.
Publisher Copyright:
© 1963-2012 IEEE.
PY - 2018/5
Y1 - 2018/5
N2 - A Pd nanoparticle (NP)/Pd film/NiO film structure, prepared with both drop-coating and RF sputtering approaches, is reported to fabricate a formaldehyde gas sensor. As compared to pristine NiO layers, the use of Pd NPs and Pd thin film is shown to enhance the catalytic capability and related sensing performance. Experimentally, a high sensing response of 10.1 is obtained under introduced 20 ppm HCHO/air gas at 250 °C. Moreover, a very low detection level of 16 ppb HCHO/air is acquired. The optimal operating temperature is 250 °C. Due to the nonuniform distribution or agglomeration effect of Pd NPs, a relatively slow sensing speed is found. Based on the superior performance indicated earlier and advantages including low cost, easy fabrication, and chemical stability, the studied device is promising for formaldehyde sensing applications.
AB - A Pd nanoparticle (NP)/Pd film/NiO film structure, prepared with both drop-coating and RF sputtering approaches, is reported to fabricate a formaldehyde gas sensor. As compared to pristine NiO layers, the use of Pd NPs and Pd thin film is shown to enhance the catalytic capability and related sensing performance. Experimentally, a high sensing response of 10.1 is obtained under introduced 20 ppm HCHO/air gas at 250 °C. Moreover, a very low detection level of 16 ppb HCHO/air is acquired. The optimal operating temperature is 250 °C. Due to the nonuniform distribution or agglomeration effect of Pd NPs, a relatively slow sensing speed is found. Based on the superior performance indicated earlier and advantages including low cost, easy fabrication, and chemical stability, the studied device is promising for formaldehyde sensing applications.
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U2 - 10.1109/TED.2018.2819181
DO - 10.1109/TED.2018.2819181
M3 - Article
AN - SCOPUS:85046035806
SN - 0018-9383
VL - 65
SP - 1956
EP - 1961
JO - IEEE Transactions on Electron Devices
JF - IEEE Transactions on Electron Devices
IS - 5
ER -