Formaldehyde sensing characteristics of a nio-based sensor decorated with Pd nanoparticles and a Pd Thin film

Huey-Ing Chen, Cheng Yu Hsiao, Wei Cheng Chen, Ching Hong Chang, I-Ping Liu, Tzu Chieh Chou, Wen-Chau Liu

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A Pd nanoparticle (NP)/Pd film/NiO film structure, prepared with both drop-coating and RF sputtering approaches, is reported to fabricate a formaldehyde gas sensor. As compared to pristine NiO layers, the use of Pd NPs and Pd thin film is shown to enhance the catalytic capability and related sensing performance. Experimentally, a high sensing response of 10.1 is obtained under introduced 20 ppm HCHO/air gas at 250 °C. Moreover, a very low detection level of 16 ppb HCHO/air is acquired. The optimal operating temperature is 250 °C. Due to the nonuniform distribution or agglomeration effect of Pd NPs, a relatively slow sensing speed is found. Based on the superior performance indicated earlier and advantages including low cost, easy fabrication, and chemical stability, the studied device is promising for formaldehyde sensing applications.

Original languageEnglish
Pages (from-to)1956-1961
Number of pages6
JournalIEEE Transactions on Electron Devices
Volume65
Issue number5
DOIs
Publication statusPublished - 2018 May 1

Fingerprint

Formaldehyde
Nanoparticles
Thin films
Chemical stability
Sensors
Air
Chemical sensors
Sputtering
Agglomeration
Gases
Fabrication
Coatings
Costs
Temperature

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

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title = "Formaldehyde sensing characteristics of a nio-based sensor decorated with Pd nanoparticles and a Pd Thin film",
abstract = "A Pd nanoparticle (NP)/Pd film/NiO film structure, prepared with both drop-coating and RF sputtering approaches, is reported to fabricate a formaldehyde gas sensor. As compared to pristine NiO layers, the use of Pd NPs and Pd thin film is shown to enhance the catalytic capability and related sensing performance. Experimentally, a high sensing response of 10.1 is obtained under introduced 20 ppm HCHO/air gas at 250 °C. Moreover, a very low detection level of 16 ppb HCHO/air is acquired. The optimal operating temperature is 250 °C. Due to the nonuniform distribution or agglomeration effect of Pd NPs, a relatively slow sensing speed is found. Based on the superior performance indicated earlier and advantages including low cost, easy fabrication, and chemical stability, the studied device is promising for formaldehyde sensing applications.",
author = "Huey-Ing Chen and Hsiao, {Cheng Yu} and Chen, {Wei Cheng} and Chang, {Ching Hong} and I-Ping Liu and Chou, {Tzu Chieh} and Wen-Chau Liu",
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Formaldehyde sensing characteristics of a nio-based sensor decorated with Pd nanoparticles and a Pd Thin film. / Chen, Huey-Ing; Hsiao, Cheng Yu; Chen, Wei Cheng; Chang, Ching Hong; Liu, I-Ping; Chou, Tzu Chieh; Liu, Wen-Chau.

In: IEEE Transactions on Electron Devices, Vol. 65, No. 5, 01.05.2018, p. 1956-1961.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Formaldehyde sensing characteristics of a nio-based sensor decorated with Pd nanoparticles and a Pd Thin film

AU - Chen, Huey-Ing

AU - Hsiao, Cheng Yu

AU - Chen, Wei Cheng

AU - Chang, Ching Hong

AU - Liu, I-Ping

AU - Chou, Tzu Chieh

AU - Liu, Wen-Chau

PY - 2018/5/1

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AB - A Pd nanoparticle (NP)/Pd film/NiO film structure, prepared with both drop-coating and RF sputtering approaches, is reported to fabricate a formaldehyde gas sensor. As compared to pristine NiO layers, the use of Pd NPs and Pd thin film is shown to enhance the catalytic capability and related sensing performance. Experimentally, a high sensing response of 10.1 is obtained under introduced 20 ppm HCHO/air gas at 250 °C. Moreover, a very low detection level of 16 ppb HCHO/air is acquired. The optimal operating temperature is 250 °C. Due to the nonuniform distribution or agglomeration effect of Pd NPs, a relatively slow sensing speed is found. Based on the superior performance indicated earlier and advantages including low cost, easy fabrication, and chemical stability, the studied device is promising for formaldehyde sensing applications.

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