Formaldehyde sensing characteristics of a nio-based sensor decorated with Pd nanoparticles and a Pd Thin film

Huey Ing Chen, Cheng Yu Hsiao, Wei Cheng Chen, Ching Hong Chang, I. Ping Liu, Tzu Chieh Chou, Wen Chau Liu

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4 Citations (Scopus)


A Pd nanoparticle (NP)/Pd film/NiO film structure, prepared with both drop-coating and RF sputtering approaches, is reported to fabricate a formaldehyde gas sensor. As compared to pristine NiO layers, the use of Pd NPs and Pd thin film is shown to enhance the catalytic capability and related sensing performance. Experimentally, a high sensing response of 10.1 is obtained under introduced 20 ppm HCHO/air gas at 250 °C. Moreover, a very low detection level of 16 ppb HCHO/air is acquired. The optimal operating temperature is 250 °C. Due to the nonuniform distribution or agglomeration effect of Pd NPs, a relatively slow sensing speed is found. Based on the superior performance indicated earlier and advantages including low cost, easy fabrication, and chemical stability, the studied device is promising for formaldehyde sensing applications.

Original languageEnglish
Pages (from-to)1956-1961
Number of pages6
JournalIEEE Transactions on Electron Devices
Issue number5
Publication statusPublished - 2018 May


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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