Formaldehyde sensing characteristics of an aluminum-doped zinc oxide (AZO) thin-film-based sensor

Cheng Yu Chi, Huey-Ing Chen, Wei Cheng Chen, Ching Hong Chang, Wen-Chau Liu

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

An aluminum-doped zinc oxide (AZO) thin-film-based formaldehyde sensor prepared using radio-frequency sputtering (RF) is studied. The proposed device has a very high formaldehyde sensing response of 95.5 (@20 ppm HCHO/air, 350 °C), an extremely low detection limit (≤40 ppb HCHO/air), a relatively low operating temperature (≤350 °C), and a wide sensing range. Moreover, the device has a simple structure and is easily fabricated, low cost, and environmentally friendly. Therefore, the proposed AZO thin-film-based sensor is promising for high-performance formaldehyde sensing applications.

Original languageEnglish
Pages (from-to)3017-3024
Number of pages8
JournalSensors and Actuators, B: Chemical
Volume255
DOIs
Publication statusPublished - 2018 Feb 1

Fingerprint

Zinc Oxide
Zinc oxide
formaldehyde
Aluminum
Formaldehyde
zinc oxides
Oxide films
aluminum
Thin films
sensors
Sensors
thin films
Air
Sputtering
air
operating temperature
radio frequencies
sputtering
Costs
Temperature

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

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abstract = "An aluminum-doped zinc oxide (AZO) thin-film-based formaldehyde sensor prepared using radio-frequency sputtering (RF) is studied. The proposed device has a very high formaldehyde sensing response of 95.5 (@20 ppm HCHO/air, 350 °C), an extremely low detection limit (≤40 ppb HCHO/air), a relatively low operating temperature (≤350 °C), and a wide sensing range. Moreover, the device has a simple structure and is easily fabricated, low cost, and environmentally friendly. Therefore, the proposed AZO thin-film-based sensor is promising for high-performance formaldehyde sensing applications.",
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Formaldehyde sensing characteristics of an aluminum-doped zinc oxide (AZO) thin-film-based sensor. / Chi, Cheng Yu; Chen, Huey-Ing; Chen, Wei Cheng; Chang, Ching Hong; Liu, Wen-Chau.

In: Sensors and Actuators, B: Chemical, Vol. 255, 01.02.2018, p. 3017-3024.

Research output: Contribution to journalArticle

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