Formaldehyde sensing characteristics of an aluminum-doped zinc oxide (AZO) thin-film-based sensor

Cheng Yu Chi, Huey Ing Chen, Wei Cheng Chen, Ching Hong Chang, Wen Chau Liu

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)


An aluminum-doped zinc oxide (AZO) thin-film-based formaldehyde sensor prepared using radio-frequency sputtering (RF) is studied. The proposed device has a very high formaldehyde sensing response of 95.5 (@20 ppm HCHO/air, 350 °C), an extremely low detection limit (≤40 ppb HCHO/air), a relatively low operating temperature (≤350 °C), and a wide sensing range. Moreover, the device has a simple structure and is easily fabricated, low cost, and environmentally friendly. Therefore, the proposed AZO thin-film-based sensor is promising for high-performance formaldehyde sensing applications.

Original languageEnglish
Pages (from-to)3017-3024
Number of pages8
JournalSensors and Actuators, B: Chemical
Publication statusPublished - 2018 Feb

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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