Formation and identification of secondary oxide phases in co-sputtered ZnO:Cr films

Y. M. Hu; C. W. Hsu; C. Y. Wang; S. S. Lee; J. W. Chiou; T. C. Han; G. J. Chen; W. Y. Chou; J. Chang

doi:10.1016/j.tsf.2009.10.162

Formation and identification of secondary oxide phases in co-sputtered ZnO:Cr films

Y. M. Hu, C. W. Hsu, C. Y. Wang, S. S. Lee, J. W. Chiou, T. C. Han, G. J. Chen, W. Y. Chou, J. Chang

Department of Photonics

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

The secondary oxide phases in ZnO:Cr films have been observed to evolve from an initial Cr₂O₃ phase near the film surface to a final ZnCr₂O₄ phase throughout the film as the Cr content is increased. Two absorption bands, corresponding to the ⁴A₂→⁴ T₁ and ⁴A₂→⁴ T₂ transitions of Cr³⁺, can be observed in the Cr₂O₃-rich sample, whereas the ZnCr₂O₄-rich sample is opaque at wavelengths ≤ 500 nm. Our results suggest that the formation of secondary oxide phases in ZnO:Cr films is inevitable, leading to a much lower solubility of Cr.

Original language	English
Pages (from-to)	2916-2919
Number of pages	4
Journal	Thin Solid Films
Volume	518
Issue number	10
DOIs	https://doi.org/10.1016/j.tsf.2009.10.162
Publication status	Published - 2010 Mar 1

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2009.10.162

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title = "Formation and identification of secondary oxide phases in co-sputtered ZnO:Cr films",

abstract = "The secondary oxide phases in ZnO:Cr films have been observed to evolve from an initial Cr2O3 phase near the film surface to a final ZnCr2O4 phase throughout the film as the Cr content is increased. Two absorption bands, corresponding to the 4A2→4 T1 and 4A2→4 T2 transitions of Cr3+, can be observed in the Cr2O3-rich sample, whereas the ZnCr2O4-rich sample is opaque at wavelengths ≤ 500 nm. Our results suggest that the formation of secondary oxide phases in ZnO:Cr films is inevitable, leading to a much lower solubility of Cr.",

author = "Hu, {Y. M.} and Hsu, {C. W.} and Wang, {C. Y.} and Lee, {S. S.} and Chiou, {J. W.} and Han, {T. C.} and Chen, {G. J.} and Chou, {W. Y.} and J. Chang",

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doi = "10.1016/j.tsf.2009.10.162",

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T1 - Formation and identification of secondary oxide phases in co-sputtered ZnO:Cr films

AU - Hu, Y. M.

AU - Hsu, C. W.

AU - Wang, C. Y.

AU - Lee, S. S.

AU - Chiou, J. W.

AU - Han, T. C.

AU - Chen, G. J.

AU - Chou, W. Y.

AU - Chang, J.

PY - 2010/3/1

Y1 - 2010/3/1

N2 - The secondary oxide phases in ZnO:Cr films have been observed to evolve from an initial Cr2O3 phase near the film surface to a final ZnCr2O4 phase throughout the film as the Cr content is increased. Two absorption bands, corresponding to the 4A2→4 T1 and 4A2→4 T2 transitions of Cr3+, can be observed in the Cr2O3-rich sample, whereas the ZnCr2O4-rich sample is opaque at wavelengths ≤ 500 nm. Our results suggest that the formation of secondary oxide phases in ZnO:Cr films is inevitable, leading to a much lower solubility of Cr.

AB - The secondary oxide phases in ZnO:Cr films have been observed to evolve from an initial Cr2O3 phase near the film surface to a final ZnCr2O4 phase throughout the film as the Cr content is increased. Two absorption bands, corresponding to the 4A2→4 T1 and 4A2→4 T2 transitions of Cr3+, can be observed in the Cr2O3-rich sample, whereas the ZnCr2O4-rich sample is opaque at wavelengths ≤ 500 nm. Our results suggest that the formation of secondary oxide phases in ZnO:Cr films is inevitable, leading to a much lower solubility of Cr.

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Formation and identification of secondary oxide phases in co-sputtered ZnO:Cr films

Abstract

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