Formation and observation of thermal bubble from multilayer heating material

C. K. Chung, E. C. Chang, B. H. Zou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The target of this research is to design and fabricate the micro-heater and its electrodes in order to study the thermal bubble behavior. In fabrication of micro-heater, this research focus on the design of multilayer micro-heater and the selection of materials further. For the multilayer materials, we choose Ti/Al/Ta (15/25/200 nm/nm/nm) to be the material to replace the conventional polysilicon, Ta or expensive Pt heaters for improving the heat-resistant ability of Pt, poor adhesion of Ta and high electrical resistance of polysilicon. Then, the bubble sizes between frequencies and voltages were discussed in the multilayer heating materials. The multilayer micro-heater in this research can generate good bubbles at low frequencies operation. It has the advantages of low electrical resistance, the good thermal resistance, and the good heat dissipation to contribute to improve the poor heat dissipation and strength of the Pt microheater in order to increase the life of the heater.

Original languageEnglish
Title of host publication2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Pages684-687
Number of pages4
DOIs
Publication statusPublished - 2010 Nov 29
Event5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China
Duration: 2010 Jan 202010 Jan 23

Publication series

Name2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Other

Other5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Country/TerritoryChina
CityXiamen
Period10-01-2010-01-23

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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