Formation of epitaxial silicide in silicon nanowires

Yi Chia Chou, Kuo-Chang Lu, King Ning Tu

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationSilicon and Silicide Nanowires
Subtitle of host publicationApplications, Fabrication and Properties
PublisherPan Stanford Publishing Pte. Ltd.
Pages187-243
Number of pages57
ISBN (Electronic)9789814303477
ISBN (Print)9789814303460
DOIs
Publication statusPublished - 2013 Sep 30

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Materials Science(all)

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