Fracture analysis of thick plasma-enhanced chemical vapor deposited oxide films for improving the structural integrity of power MEMS

K. S. Chen, J. Y. Chen, S. Y. Lin

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Fracture analysis of thick plasma-enhanced chemical vapor deposited oxide films for improving the structural integrity of power MEMS'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds