TY - GEN
T1 - Frequency response and mode shape characterization for acoustic sensor in micro-opto-mechanical technology
AU - Huang, C. H.
AU - Gao, H.
AU - Haouari, R.
AU - Troia, B.
AU - Mao, S.
AU - Jansen, R.
AU - Rochus, V.
AU - Rottenberg, X.
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/10/31
Y1 - 2017/10/31
N2 - This paper presents the characterization of frequency response and mode shape at the 1st harmonic frequency of a Micro-Opto-Mechanical Acoustic Sensors (MOMAS) with a Mach-Zehnder Interferometer (MZI) readout system. In previous research, the static modeling and characterization has been demonstrated. In this paper, we investigate the capability of using MOMAS in ultrasound domain as a Micro-Opto-Mechanical Acoustic Sensor (MOMAS). We characterize the resonance frequency and mode shapes of three MOMAS by using a laser Doppler vibrometer(LDV) and a piezo shaker. The resonance frequencies range from 75kHz to 262kHz and the mode shapes are between a standard circular plate and a membrane mode. The results are compared with analytical models and finite element simulations to examine the effect of residual stress.
AB - This paper presents the characterization of frequency response and mode shape at the 1st harmonic frequency of a Micro-Opto-Mechanical Acoustic Sensors (MOMAS) with a Mach-Zehnder Interferometer (MZI) readout system. In previous research, the static modeling and characterization has been demonstrated. In this paper, we investigate the capability of using MOMAS in ultrasound domain as a Micro-Opto-Mechanical Acoustic Sensor (MOMAS). We characterize the resonance frequency and mode shapes of three MOMAS by using a laser Doppler vibrometer(LDV) and a piezo shaker. The resonance frequencies range from 75kHz to 262kHz and the mode shapes are between a standard circular plate and a membrane mode. The results are compared with analytical models and finite element simulations to examine the effect of residual stress.
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U2 - 10.1109/ULTSYM.2017.8092985
DO - 10.1109/ULTSYM.2017.8092985
M3 - Conference contribution
AN - SCOPUS:85039448207
T3 - IEEE International Ultrasonics Symposium, IUS
BT - 2017 IEEE International Ultrasonics Symposium, IUS 2017
PB - IEEE Computer Society
T2 - 2017 IEEE International Ultrasonics Symposium, IUS 2017
Y2 - 6 September 2017 through 9 September 2017
ER -