Frequency response and mode shape characterization for acoustic sensor in micro-opto-mechanical technology

C. H. Huang, H. Gao, R. Haouari, B. Troia, S. Mao, R. Jansen, V. Rochus, X. Rottenberg

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper presents the characterization of frequency response and mode shape at the 1st harmonic frequency of a Micro-Opto-Mechanical Acoustic Sensors (MOMAS) with a Mach-Zehnder Interferometer (MZI) readout system. In previous research, the static modeling and characterization has been demonstrated. In this paper, we investigate the capability of using MOMAS in ultrasound domain as a Micro-Opto-Mechanical Acoustic Sensor (MOMAS). We characterize the resonance frequency and mode shapes of three MOMAS by using a laser Doppler vibrometer(LDV) and a piezo shaker. The resonance frequencies range from 75kHz to 262kHz and the mode shapes are between a standard circular plate and a membrane mode. The results are compared with analytical models and finite element simulations to examine the effect of residual stress.

Original languageEnglish
Title of host publication2017 IEEE International Ultrasonics Symposium, IUS 2017
PublisherIEEE Computer Society
ISBN (Electronic)9781538633830
DOIs
Publication statusPublished - 2017 Oct 31
Event2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
Duration: 2017 Sep 62017 Sep 9

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2017 IEEE International Ultrasonics Symposium, IUS 2017
CountryUnited States
CityWashington
Period17-09-0617-09-09

All Science Journal Classification (ASJC) codes

  • Acoustics and Ultrasonics

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    Huang, C. H., Gao, H., Haouari, R., Troia, B., Mao, S., Jansen, R., Rochus, V., & Rottenberg, X. (2017). Frequency response and mode shape characterization for acoustic sensor in micro-opto-mechanical technology. In 2017 IEEE International Ultrasonics Symposium, IUS 2017 [8092985] (IEEE International Ultrasonics Symposium, IUS). IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2017.8092985