Frequency shifts and analytical solutions of an AFM curved beam

Shueei Muh Lin, Chihng Tsung Liauh, Sen Yung Lee, Shing Huei Ho, Wen Rong Wang

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)


The squeeze damping coefficient between the cantilever of a straight AFM probe and the surface of a biological sample in liquids is inversely proportional to their distance to the third power. Due to the small cantilever-sample distance, the quality factor of AFM in liquid is too small and results in a low signal-noise ratio. In this study, an AFM curved beam is proposed to solve this problem. Results show that the squeeze damping is significantly decreased and thus the quality factor of an AFM curved beam is greatly increased. An effective mass-spring-damper model is presented and its analytical solution is derived. Moreover, the formulas of the resonant quality factor and frequency shift are discovered. In addition to the requirement of the low squeeze damping, high frequency shifts or sensitivities is necessary for accurate measurement. Results indicate that the effects of the arc angle and several parameters on the quality factor and the frequency shifts are significant. The optimum parameters for high quality and frequency shift are also investigated.

Original languageEnglish
Pages (from-to)296-305
Number of pages10
JournalMeasurement: Journal of the International Measurement Confederation
Issue number1
Publication statusPublished - 2014

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering


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