Abstract
In this work, diffractive microlenses were fabricated in GaN using a gray-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN band- pass filter in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can potentially be used in a UV micro-optics system such as for solar-blind detection. In the design example of this work, the structure may enhance the ultaviolet/visible rejection to 102.
Original language | English |
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Pages (from-to) | 287-289 |
Number of pages | 3 |
Journal | Optical Review |
Volume | 10 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2003 Jan 1 |
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics