Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System

Chia Hung Hou; Ming Hung Li; Chii Chang Chen; Jenq Yang Chang; Jinn Kong Sheu; Gou Chung Chi; Chuck Wu; Wei Tai Cheng; Jui Hung Yeh

doi:10.1007/s10043-003-0287-1

Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System

Chia Hung Hou, Ming Hung Li, Chii Chang Chen, Jenq Yang Chang, Jinn Kong Sheu, Gou Chung Chi, Chuck Wu, Wei Tai Cheng, Jui Hung Yeh

Department of Photonics

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

In this work, diffractive microlenses were fabricated in GaN using a gray-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN band- pass filter in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can potentially be used in a UV micro-optics system such as for solar-blind detection. In the design example of this work, the structure may enhance the ultaviolet/visible rejection to 10².

Original language	English
Pages (from-to)	287-289
Number of pages	3
Journal	Optical Review
Volume	10
Issue number	4
DOIs	https://doi.org/10.1007/s10043-003-0287-1
Publication status	Published - 2003 Jan 1

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics

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title = "Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System",

abstract = "In this work, diffractive microlenses were fabricated in GaN using a gray-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN band- pass filter in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can potentially be used in a UV micro-optics system such as for solar-blind detection. In the design example of this work, the structure may enhance the ultaviolet/visible rejection to 102.",

author = "Hou, {Chia Hung} and Li, {Ming Hung} and Chen, {Chii Chang} and Chang, {Jenq Yang} and Sheu, {Jinn Kong} and Chi, {Gou Chung} and Chuck Wu and Cheng, {Wei Tai} and Yeh, {Jui Hung}",

year = "2003",

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doi = "10.1007/s10043-003-0287-1",

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T1 - Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System

AU - Hou, Chia Hung

AU - Li, Ming Hung

AU - Chen, Chii Chang

AU - Chang, Jenq Yang

AU - Sheu, Jinn Kong

AU - Chi, Gou Chung

AU - Wu, Chuck

AU - Cheng, Wei Tai

AU - Yeh, Jui Hung

PY - 2003/1/1

Y1 - 2003/1/1

N2 - In this work, diffractive microlenses were fabricated in GaN using a gray-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN band- pass filter in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can potentially be used in a UV micro-optics system such as for solar-blind detection. In the design example of this work, the structure may enhance the ultaviolet/visible rejection to 102.

AB - In this work, diffractive microlenses were fabricated in GaN using a gray-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN band- pass filter in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can potentially be used in a UV micro-optics system such as for solar-blind detection. In the design example of this work, the structure may enhance the ultaviolet/visible rejection to 102.

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