A prototype of a GaN-based stacked micro-optics system is demonstrated. The system consists of a GaN microlens, GaN membrane gratings, six spacers, a spatial filter, and a 980 nm VCSEL. The laser beam is collimated by the GaN microlens and diffracted by the GaN membrane grating. The systems can be used in blue-violet-UV micro-optics systems.
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
- Engineering (miscellaneous)
- Electrical and Electronic Engineering