GaN diffractive microlenses for UV micro-optics system

C. C. Hou, M. H. Li, C. C. Chen, Jinn-Kong Sheu, J. Y. Chang, G. C. Chi, Chuck Wu, W. T. Cheng, J. H. Yeh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this work, diffractive microlenses were fabricated in GaN-based material by using gravy-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN anti-reflection thin films in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can be potentially used in the UV micro-optics system such as solar-blind detection applications. In the design example of this work, the structure may enhance the ultraviolet/visible rejection to be 102.

Original languageEnglish
Title of host publicationCLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
Subtitle of host publicationPhotonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages1
ISBN (Electronic)0780377664
DOIs
Publication statusPublished - 2003 Jan 1
Event5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan
Duration: 2003 Dec 152003 Dec 19

Publication series

NamePacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume2

Other

Other5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
CountryTaiwan
CityTaipei
Period03-12-1503-12-19

Fingerprint

Microlenses
Microoptics
rejection
optics
plasma etching
inserts
masks
Plasma etching
Inductively coupled plasma
Transparency
Masks
thin films
Thin films

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Hou, C. C., Li, M. H., Chen, C. C., Sheu, J-K., Chang, J. Y., Chi, G. C., ... Yeh, J. H. (2003). GaN diffractive microlenses for UV micro-optics system. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings [1277255] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2003.1277255
Hou, C. C. ; Li, M. H. ; Chen, C. C. ; Sheu, Jinn-Kong ; Chang, J. Y. ; Chi, G. C. ; Wu, Chuck ; Cheng, W. T. ; Yeh, J. H. / GaN diffractive microlenses for UV micro-optics system. CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).
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abstract = "In this work, diffractive microlenses were fabricated in GaN-based material by using gravy-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN anti-reflection thin films in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can be potentially used in the UV micro-optics system such as solar-blind detection applications. In the design example of this work, the structure may enhance the ultraviolet/visible rejection to be 102.",
author = "Hou, {C. C.} and Li, {M. H.} and Chen, {C. C.} and Jinn-Kong Sheu and Chang, {J. Y.} and Chi, {G. C.} and Chuck Wu and Cheng, {W. T.} and Yeh, {J. H.}",
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Hou, CC, Li, MH, Chen, CC, Sheu, J-K, Chang, JY, Chi, GC, Wu, C, Cheng, WT & Yeh, JH 2003, GaN diffractive microlenses for UV micro-optics system. in CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings., 1277255, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, vol. 2, Institute of Electrical and Electronics Engineers Inc., 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003, Taipei, Taiwan, 03-12-15. https://doi.org/10.1109/CLEOPR.2003.1277255

GaN diffractive microlenses for UV micro-optics system. / Hou, C. C.; Li, M. H.; Chen, C. C.; Sheu, Jinn-Kong; Chang, J. Y.; Chi, G. C.; Wu, Chuck; Cheng, W. T.; Yeh, J. H.

CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. 1277255 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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T1 - GaN diffractive microlenses for UV micro-optics system

AU - Hou, C. C.

AU - Li, M. H.

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AU - Chang, J. Y.

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N2 - In this work, diffractive microlenses were fabricated in GaN-based material by using gravy-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN anti-reflection thin films in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can be potentially used in the UV micro-optics system such as solar-blind detection applications. In the design example of this work, the structure may enhance the ultraviolet/visible rejection to be 102.

AB - In this work, diffractive microlenses were fabricated in GaN-based material by using gravy-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN anti-reflection thin films in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can be potentially used in the UV micro-optics system such as solar-blind detection applications. In the design example of this work, the structure may enhance the ultraviolet/visible rejection to be 102.

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M3 - Conference contribution

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BT - CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics

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Hou CC, Li MH, Chen CC, Sheu J-K, Chang JY, Chi GC et al. GaN diffractive microlenses for UV micro-optics system. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2003. 1277255. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2003.1277255