GaN MOSFET with liquid phase deposited oxide gate

Kuan Wei Lee, Dei Wei Chou, Hou Run Wu, Jian Jun Huang, Yeong Her Wang, Mau Phon Houng, Sou Jinn Chang, Yan Kuin Su

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

Liquid phase deposited SiO2 as the insulating gate on an n-channel depletion mode GaN MOSFET is demonstrated. For a device with a 13 μm source-to-drain distance and gate metal of 8 × 40 μm2, a transconductance of 48 m/S/mm and a drain current of 250 mA/mm at Vgs=4 V and Vds=20 V can be achieved.

Original languageEnglish
Pages (from-to)829-830
Number of pages2
JournalElectronics Letters
Volume38
Issue number15
DOIs
Publication statusPublished - 2002 Jul 18

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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