Gap regulation for suspended rotating disk used for microgyroscopes

Nan-Chyuan Tsai; Bing Hong Liou; Chih Che Lin

doi:10.1117/1.3256005

Gap regulation for suspended rotating disk used for microgyroscopes

Nan-Chyuan Tsai, Bing Hong Liou, Chih Che Lin

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

An innovative magnetic module that is concurrently capable of performing as an actuator and a sensor is proposed and analyzed. The magnetic module is basically similar to a microscale linear variable differential transformer (LVDT), which is employed to actively adjust the height of a rotating seismic disk used in a gyroscope so that the pitch rate induced by Coriolis effect, due to exerted angular excitation, can be accurately measured. On one hand, the micromagnetic module acts like an actuator for height regulation on the seismic proof mass by applying appropriate electric current to the primary winding of the LVDT unit. On the other hand, the secondary winding pair of the LVDT acts like a sensor that can detect the gap change between the seismic rotating disk and the micromagnetic LVDT module, and the rotation speed (i.e., frequency) by the induced current.

Original language	English
Article number	043045
Journal	Journal of Micro/Nanolithography, MEMS, and MOEMS
Volume	8
Issue number	4
DOIs	https://doi.org/10.1117/1.3256005
Publication status	Published - 2009 Jan 1

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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title = "Gap regulation for suspended rotating disk used for microgyroscopes",

abstract = "An innovative magnetic module that is concurrently capable of performing as an actuator and a sensor is proposed and analyzed. The magnetic module is basically similar to a microscale linear variable differential transformer (LVDT), which is employed to actively adjust the height of a rotating seismic disk used in a gyroscope so that the pitch rate induced by Coriolis effect, due to exerted angular excitation, can be accurately measured. On one hand, the micromagnetic module acts like an actuator for height regulation on the seismic proof mass by applying appropriate electric current to the primary winding of the LVDT unit. On the other hand, the secondary winding pair of the LVDT acts like a sensor that can detect the gap change between the seismic rotating disk and the micromagnetic LVDT module, and the rotation speed (i.e., frequency) by the induced current.",

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AU - Tsai, Nan-Chyuan

AU - Liou, Bing Hong

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N2 - An innovative magnetic module that is concurrently capable of performing as an actuator and a sensor is proposed and analyzed. The magnetic module is basically similar to a microscale linear variable differential transformer (LVDT), which is employed to actively adjust the height of a rotating seismic disk used in a gyroscope so that the pitch rate induced by Coriolis effect, due to exerted angular excitation, can be accurately measured. On one hand, the micromagnetic module acts like an actuator for height regulation on the seismic proof mass by applying appropriate electric current to the primary winding of the LVDT unit. On the other hand, the secondary winding pair of the LVDT acts like a sensor that can detect the gap change between the seismic rotating disk and the micromagnetic LVDT module, and the rotation speed (i.e., frequency) by the induced current.

AB - An innovative magnetic module that is concurrently capable of performing as an actuator and a sensor is proposed and analyzed. The magnetic module is basically similar to a microscale linear variable differential transformer (LVDT), which is employed to actively adjust the height of a rotating seismic disk used in a gyroscope so that the pitch rate induced by Coriolis effect, due to exerted angular excitation, can be accurately measured. On one hand, the micromagnetic module acts like an actuator for height regulation on the seismic proof mass by applying appropriate electric current to the primary winding of the LVDT unit. On the other hand, the secondary winding pair of the LVDT acts like a sensor that can detect the gap change between the seismic rotating disk and the micromagnetic LVDT module, and the rotation speed (i.e., frequency) by the induced current.

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