TY - JOUR
T1 - Gap regulation for suspended rotating disk used for microgyroscopes
AU - Tsai, Nan Chyuan
AU - Liou, Bing Hong
AU - Lin, Chih Che
N1 - Funding Information:
The authors would like to thank National Nano Devices Laboratory (NDL) for equipment access and technical support. This research was partially supported by National Science Council (Taiwan) with Grant No. NSC97-2221-E-006-182.
PY - 2009
Y1 - 2009
N2 - An innovative magnetic module that is concurrently capable of performing as an actuator and a sensor is proposed and analyzed. The magnetic module is basically similar to a microscale linear variable differential transformer (LVDT), which is employed to actively adjust the height of a rotating seismic disk used in a gyroscope so that the pitch rate induced by Coriolis effect, due to exerted angular excitation, can be accurately measured. On one hand, the micromagnetic module acts like an actuator for height regulation on the seismic proof mass by applying appropriate electric current to the primary winding of the LVDT unit. On the other hand, the secondary winding pair of the LVDT acts like a sensor that can detect the gap change between the seismic rotating disk and the micromagnetic LVDT module, and the rotation speed (i.e., frequency) by the induced current.
AB - An innovative magnetic module that is concurrently capable of performing as an actuator and a sensor is proposed and analyzed. The magnetic module is basically similar to a microscale linear variable differential transformer (LVDT), which is employed to actively adjust the height of a rotating seismic disk used in a gyroscope so that the pitch rate induced by Coriolis effect, due to exerted angular excitation, can be accurately measured. On one hand, the micromagnetic module acts like an actuator for height regulation on the seismic proof mass by applying appropriate electric current to the primary winding of the LVDT unit. On the other hand, the secondary winding pair of the LVDT acts like a sensor that can detect the gap change between the seismic rotating disk and the micromagnetic LVDT module, and the rotation speed (i.e., frequency) by the induced current.
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U2 - 10.1117/1.3256005
DO - 10.1117/1.3256005
M3 - Article
AN - SCOPUS:80055075183
VL - 8
JO - Journal of Micro/ Nanolithography, MEMS, and MOEMS
JF - Journal of Micro/ Nanolithography, MEMS, and MOEMS
SN - 1932-5150
IS - 4
M1 - 043045
ER -