TY - GEN
T1 - Gas flow sensing with a piezoresistive micro-cantilever
AU - Wang, Yu Hslang
AU - Lee, Chia Yen
AU - Ma, Rong Hua
AU - Fu, Lung Ming
N1 - Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2006
Y1 - 2006
N2 - This study exploits a bending-up cantilever caused by residual stress to manufacture a micro gas flow sensor. MEMS techniques are used to deposit a silicon nitride layer on a silicon wafer to create a piezoresistive structure. A platinum layer is deposited on the silicon nitride layer to form a resistor and the structure is then etched to form a freestanding micro-cantilever. When an airflow passes over the cantilever beam, a deformation of the resistor occurs. Variations in the airflow velocity are then determined by measuring the corresponding change in the resistance using an LCR meter. The experimental data indicate that the proposed gas flow sensor has a high sensitivity (0.0533 Ω/ms-1) and a high measurement limit (45 ms-1).
AB - This study exploits a bending-up cantilever caused by residual stress to manufacture a micro gas flow sensor. MEMS techniques are used to deposit a silicon nitride layer on a silicon wafer to create a piezoresistive structure. A platinum layer is deposited on the silicon nitride layer to form a resistor and the structure is then etched to form a freestanding micro-cantilever. When an airflow passes over the cantilever beam, a deformation of the resistor occurs. Variations in the airflow velocity are then determined by measuring the corresponding change in the resistance using an LCR meter. The experimental data indicate that the proposed gas flow sensor has a high sensitivity (0.0533 Ω/ms-1) and a high measurement limit (45 ms-1).
UR - http://www.scopus.com/inward/record.url?scp=50149106545&partnerID=8YFLogxK
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U2 - 10.1109/ICSENS.2007.355906
DO - 10.1109/ICSENS.2007.355906
M3 - Conference contribution
AN - SCOPUS:50149106545
SN - 1424403766
SN - 9781424403769
T3 - Proceedings of IEEE Sensors
SP - 1448
EP - 1451
BT - 2006 5th IEEE Conference on Sensors
T2 - 2006 5th IEEE Conference on Sensors
Y2 - 22 October 2006 through 25 October 2006
ER -