Gas flow sensing with a piezoresistive micro-cantilever

Yu Hslang Wang, Chia Yen Lee, Rong Hua Ma, Lung Ming Fu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This study exploits a bending-up cantilever caused by residual stress to manufacture a micro gas flow sensor. MEMS techniques are used to deposit a silicon nitride layer on a silicon wafer to create a piezoresistive structure. A platinum layer is deposited on the silicon nitride layer to form a resistor and the structure is then etched to form a freestanding micro-cantilever. When an airflow passes over the cantilever beam, a deformation of the resistor occurs. Variations in the airflow velocity are then determined by measuring the corresponding change in the resistance using an LCR meter. The experimental data indicate that the proposed gas flow sensor has a high sensitivity (0.0533 Ω/ms-1) and a high measurement limit (45 ms-1).

Original languageEnglish
Title of host publication2006 5th IEEE Conference on Sensors
Pages1448-1451
Number of pages4
DOIs
Publication statusPublished - 2006
Event2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of
Duration: 2006 Oct 222006 Oct 25

Publication series

NameProceedings of IEEE Sensors

Other

Other2006 5th IEEE Conference on Sensors
Country/TerritoryKorea, Republic of
CityDaegu
Period06-10-2206-10-25

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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