Gas flow sensing with a piezoresistive micro-cantilever

Yu Hslang Wang; Chia Yen Lee; Rong Hua Ma; Lung Ming Fu

doi:10.1109/ICSENS.2007.355906

Gas flow sensing with a piezoresistive micro-cantilever

Yu Hslang Wang, Chia Yen Lee, Rong Hua Ma, Lung Ming Fu

Department of Engineering Science

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

This study exploits a bending-up cantilever caused by residual stress to manufacture a micro gas flow sensor. MEMS techniques are used to deposit a silicon nitride layer on a silicon wafer to create a piezoresistive structure. A platinum layer is deposited on the silicon nitride layer to form a resistor and the structure is then etched to form a freestanding micro-cantilever. When an airflow passes over the cantilever beam, a deformation of the resistor occurs. Variations in the airflow velocity are then determined by measuring the corresponding change in the resistance using an LCR meter. The experimental data indicate that the proposed gas flow sensor has a high sensitivity (0.0533 Ω/ms^-1) and a high measurement limit (45 ms^-1).

Original language	English
Title of host publication	2006 5th IEEE Conference on Sensors
Pages	1448-1451
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2007.355906
Publication status	Published - 2006
Event	2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of Duration: 2006 Oct 22 → 2006 Oct 25

Publication series

Name	Proceedings of IEEE Sensors

Other

Other	2006 5th IEEE Conference on Sensors
Country/Territory	Korea, Republic of
City	Daegu
Period	06-10-22 → 06-10-25

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Access to Document

10.1109/ICSENS.2007.355906

Cite this

@inproceedings{4b266e7cf9bf43f09c2f592e91ebc190,

title = "Gas flow sensing with a piezoresistive micro-cantilever",

abstract = "This study exploits a bending-up cantilever caused by residual stress to manufacture a micro gas flow sensor. MEMS techniques are used to deposit a silicon nitride layer on a silicon wafer to create a piezoresistive structure. A platinum layer is deposited on the silicon nitride layer to form a resistor and the structure is then etched to form a freestanding micro-cantilever. When an airflow passes over the cantilever beam, a deformation of the resistor occurs. Variations in the airflow velocity are then determined by measuring the corresponding change in the resistance using an LCR meter. The experimental data indicate that the proposed gas flow sensor has a high sensitivity (0.0533 Ω/ms-1) and a high measurement limit (45 ms-1).",

author = "Wang, {Yu Hslang} and Lee, {Chia Yen} and Ma, {Rong Hua} and Fu, {Lung Ming}",

year = "2006",

doi = "10.1109/ICSENS.2007.355906",

language = "English",

isbn = "1424403766",

series = "Proceedings of IEEE Sensors",

pages = "1448--1451",

booktitle = "2006 5th IEEE Conference on Sensors",

}

TY - GEN

T1 - Gas flow sensing with a piezoresistive micro-cantilever

AU - Wang, Yu Hslang

AU - Lee, Chia Yen

AU - Ma, Rong Hua

AU - Fu, Lung Ming

PY - 2006

Y1 - 2006

N2 - This study exploits a bending-up cantilever caused by residual stress to manufacture a micro gas flow sensor. MEMS techniques are used to deposit a silicon nitride layer on a silicon wafer to create a piezoresistive structure. A platinum layer is deposited on the silicon nitride layer to form a resistor and the structure is then etched to form a freestanding micro-cantilever. When an airflow passes over the cantilever beam, a deformation of the resistor occurs. Variations in the airflow velocity are then determined by measuring the corresponding change in the resistance using an LCR meter. The experimental data indicate that the proposed gas flow sensor has a high sensitivity (0.0533 Ω/ms-1) and a high measurement limit (45 ms-1).

AB - This study exploits a bending-up cantilever caused by residual stress to manufacture a micro gas flow sensor. MEMS techniques are used to deposit a silicon nitride layer on a silicon wafer to create a piezoresistive structure. A platinum layer is deposited on the silicon nitride layer to form a resistor and the structure is then etched to form a freestanding micro-cantilever. When an airflow passes over the cantilever beam, a deformation of the resistor occurs. Variations in the airflow velocity are then determined by measuring the corresponding change in the resistance using an LCR meter. The experimental data indicate that the proposed gas flow sensor has a high sensitivity (0.0533 Ω/ms-1) and a high measurement limit (45 ms-1).

UR - http://www.scopus.com/inward/record.url?scp=50149106545&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=50149106545&partnerID=8YFLogxK

U2 - 10.1109/ICSENS.2007.355906

DO - 10.1109/ICSENS.2007.355906

M3 - Conference contribution

AN - SCOPUS:50149106545

SN - 1424403766

SN - 9781424403769

T3 - Proceedings of IEEE Sensors

SP - 1448

EP - 1451

BT - 2006 5th IEEE Conference on Sensors

T2 - 2006 5th IEEE Conference on Sensors

Y2 - 22 October 2006 through 25 October 2006

ER -

Gas flow sensing with a piezoresistive micro-cantilever

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