Gas sensing characteristics of copper phthalocyanine films

Effects of film thickness and sensing temperature

Yuh-Lang Lee, Chuan Yi Sheu, Rung Hwa Hsiao

Research output: Contribution to journalArticle

66 Citations (Scopus)

Abstract

Copper phthalocyanine (CuPc) was vacuum-deposited onto gold patterned glass substrate and used for low temperature operation of NO2 sensing. The effects of film thickness, as well as the sensing temperature, on the sensitivity and recovery characteristics of the CuPc film were investigated. The results show that both film thickness and sensing temperature have significant effect to the sensing characteristics. At room temperature operation, the recovery characteristic is satisfactory for the 50nm film, and it becomes poor as increasing film thickness. Besides, the sensitivity shows little dependence on the film thickness. When the sensing temperature is elevated to 100°C, the recovery ratio of the thicker films can be improved satisfactorily, but the sensitivity of thinner films (50, 100nm) decrease as a result. However, the sensitivity increases notably with increase of film thickness and approaches the maximum value, which is comparable or even superior to that at 25°C, at about 200nm. The present results indicate that the poor recovery characteristic found in the literature can be improved by reducing the film thickness and NO2 doping period. Besides, to get superior sensing properties, a small film thickness (50nm) should be controlled for room temperature operation, but a higher thickness (200nm) is required when the operation is elevated up to 100°C.

Original languageEnglish
Pages (from-to)281-287
Number of pages7
JournalSensors and Actuators, B: Chemical
Volume99
Issue number2-3
DOIs
Publication statusPublished - 2004 May 1

Fingerprint

Film thickness
film thickness
Gases
Copper
copper
gases
recovery
Recovery
sensitivity
Temperature
temperature
Low temperature operations
room temperature
copper phthalocyanine
Thick films
Gold
thick films
Doping (additives)
Vacuum
gold

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

@article{436feb60645e4553bc4b9dff66c1be26,
title = "Gas sensing characteristics of copper phthalocyanine films: Effects of film thickness and sensing temperature",
abstract = "Copper phthalocyanine (CuPc) was vacuum-deposited onto gold patterned glass substrate and used for low temperature operation of NO2 sensing. The effects of film thickness, as well as the sensing temperature, on the sensitivity and recovery characteristics of the CuPc film were investigated. The results show that both film thickness and sensing temperature have significant effect to the sensing characteristics. At room temperature operation, the recovery characteristic is satisfactory for the 50nm film, and it becomes poor as increasing film thickness. Besides, the sensitivity shows little dependence on the film thickness. When the sensing temperature is elevated to 100°C, the recovery ratio of the thicker films can be improved satisfactorily, but the sensitivity of thinner films (50, 100nm) decrease as a result. However, the sensitivity increases notably with increase of film thickness and approaches the maximum value, which is comparable or even superior to that at 25°C, at about 200nm. The present results indicate that the poor recovery characteristic found in the literature can be improved by reducing the film thickness and NO2 doping period. Besides, to get superior sensing properties, a small film thickness (50nm) should be controlled for room temperature operation, but a higher thickness (200nm) is required when the operation is elevated up to 100°C.",
author = "Yuh-Lang Lee and Sheu, {Chuan Yi} and Hsiao, {Rung Hwa}",
year = "2004",
month = "5",
day = "1",
doi = "10.1016/j.snb.2003.11.024",
language = "English",
volume = "99",
pages = "281--287",
journal = "Sensors and Actuators, B: Chemical",
issn = "0925-4005",
publisher = "Elsevier",
number = "2-3",

}

Gas sensing characteristics of copper phthalocyanine films : Effects of film thickness and sensing temperature. / Lee, Yuh-Lang; Sheu, Chuan Yi; Hsiao, Rung Hwa.

In: Sensors and Actuators, B: Chemical, Vol. 99, No. 2-3, 01.05.2004, p. 281-287.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Gas sensing characteristics of copper phthalocyanine films

T2 - Effects of film thickness and sensing temperature

AU - Lee, Yuh-Lang

AU - Sheu, Chuan Yi

AU - Hsiao, Rung Hwa

PY - 2004/5/1

Y1 - 2004/5/1

N2 - Copper phthalocyanine (CuPc) was vacuum-deposited onto gold patterned glass substrate and used for low temperature operation of NO2 sensing. The effects of film thickness, as well as the sensing temperature, on the sensitivity and recovery characteristics of the CuPc film were investigated. The results show that both film thickness and sensing temperature have significant effect to the sensing characteristics. At room temperature operation, the recovery characteristic is satisfactory for the 50nm film, and it becomes poor as increasing film thickness. Besides, the sensitivity shows little dependence on the film thickness. When the sensing temperature is elevated to 100°C, the recovery ratio of the thicker films can be improved satisfactorily, but the sensitivity of thinner films (50, 100nm) decrease as a result. However, the sensitivity increases notably with increase of film thickness and approaches the maximum value, which is comparable or even superior to that at 25°C, at about 200nm. The present results indicate that the poor recovery characteristic found in the literature can be improved by reducing the film thickness and NO2 doping period. Besides, to get superior sensing properties, a small film thickness (50nm) should be controlled for room temperature operation, but a higher thickness (200nm) is required when the operation is elevated up to 100°C.

AB - Copper phthalocyanine (CuPc) was vacuum-deposited onto gold patterned glass substrate and used for low temperature operation of NO2 sensing. The effects of film thickness, as well as the sensing temperature, on the sensitivity and recovery characteristics of the CuPc film were investigated. The results show that both film thickness and sensing temperature have significant effect to the sensing characteristics. At room temperature operation, the recovery characteristic is satisfactory for the 50nm film, and it becomes poor as increasing film thickness. Besides, the sensitivity shows little dependence on the film thickness. When the sensing temperature is elevated to 100°C, the recovery ratio of the thicker films can be improved satisfactorily, but the sensitivity of thinner films (50, 100nm) decrease as a result. However, the sensitivity increases notably with increase of film thickness and approaches the maximum value, which is comparable or even superior to that at 25°C, at about 200nm. The present results indicate that the poor recovery characteristic found in the literature can be improved by reducing the film thickness and NO2 doping period. Besides, to get superior sensing properties, a small film thickness (50nm) should be controlled for room temperature operation, but a higher thickness (200nm) is required when the operation is elevated up to 100°C.

UR - http://www.scopus.com/inward/record.url?scp=2342512187&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=2342512187&partnerID=8YFLogxK

U2 - 10.1016/j.snb.2003.11.024

DO - 10.1016/j.snb.2003.11.024

M3 - Article

VL - 99

SP - 281

EP - 287

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

SN - 0925-4005

IS - 2-3

ER -