A recently developed self-assembled method, involving the use of a single metal target and a fixed substrate in a sputter deposition chamber, was used for the growth of various metal-containing diamond-like carbon thin films. The metals used include, Cu, Pt, and Ni. The resulting films consist of self-assembled alternating dark and bright layers, both of which constitute a period. The dark layer was found to always have a higher metal concentration than the bright layer in a period. Effects of the growth condition on the growth rate, periodicity, and film structure were examined. The relation between the growth condition and the film characteristics is discussed.
All Science Journal Classification (ASJC) codes
- Materials Science(all)