Growth and characteristics of metal-containing diamond-like carbon using a self-assembled process

Wan Yu Wu, Jyh Ming Ting

Research output: Contribution to journalArticlepeer-review

41 Citations (Scopus)

Abstract

A recently developed self-assembled method, involving the use of a single metal target and a fixed substrate in a sputter deposition chamber, was used for the growth of various metal-containing diamond-like carbon thin films. The metals used include, Cu, Pt, and Ni. The resulting films consist of self-assembled alternating dark and bright layers, both of which constitute a period. The dark layer was found to always have a higher metal concentration than the bright layer in a period. Effects of the growth condition on the growth rate, periodicity, and film structure were examined. The relation between the growth condition and the film characteristics is discussed.

Original languageEnglish
Pages (from-to)1210-1217
Number of pages8
JournalCarbon
Volume44
Issue number7
DOIs
Publication statusPublished - 2006 Jun 1

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)

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