Growth and Characterization of Nonpolar (101̄0) Zn 1-xMgxO(0 ≤ x ≤ 0.113) epitaxial films: A comparison of γ-LiAlO2 (100) and sapphire (101̄0) substrates

Wan Hsien Lin, Jih-Jen Wu, Mitch M.C. Chou, Liuwen Chang

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γ-LiAlO2 (100) and sapphire (101̄0) substrates have been employed to grow nonpolar (101̄0) Zn1-xMgxO films using metalorganic chemical vapor deposition. Zn1-xMg xO films with various Mg contents (0 ≤ x ≤ 0.113) are obtained by adjusting the partial pressure of the Mg metalorganic precursor in gas phase. Mg atoms incorporate within the films by means of substituting Zn. No segregated phase such as MgO or metal Mg is observed throughout the Zn 1-xMgxO films. Structural characterization of the films indicates that γ-LiAlO2 (100) is a superior substrate to sapphire (101̄0) for the growth of the nonpolar (101̄0) Zn 1-xMgxO films. The [100]LAO and [12̄10]ZMO || [001]LAO. On the other hand, the Zn1-xMgxO films with both (101̄0) and (101̄3) orientations are obtained on sapphire substrates although Zn 1-xMgxO (101̄0) becomes dominant with increasing Mg content. In addition, room-temperature cathodoluminescence spectra of the epitaxial (101̄0) Zn1-xMgxO films show an obvious blue shift of the near-band-edge emission with increasing Mg content, demonstrating bandgap engineering in the epitaxial nonpolar (101̄0) Zn 1-xMgxO films on the γ-LiAlO2substrates.

Original languageEnglish
Pages (from-to)3301-3306
Number of pages6
JournalCrystal Growth and Design
Issue number7
Publication statusPublished - 2009 Jul 1

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

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