Growth and characterization of nonpolar ZnO (1 0 over(1, -) 0) epitaxial film on γ-LiAlO2 substrate by chemical vapor deposition

Mitch M.C. Chou, Liuwen Chang, Hsiao Yi Chung, Teng Hsing Huang, Jih Jen Wu, Chun Wei Chen

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43 Citations (Scopus)


A simple chemical vapor deposition approach to the growth of nonpolar ZnO with [1 0 over(1, -) 0] orientation on a γ-LiAlO2 substrate is presented. The dependence of growth characteristics on the growth temperature is investigated. Following the CVD growth, the surface morphologies of ZnO film were investigated by a scanning electron microscope. The characterizations of structure and orientation by a scanning transmission electron microscope indicate that the ZnO film is oriented in the nonpolar [1 0 over(1, -) 0] m-direction. Photoluminescence result of nonpolar ZnO shows a strong UV emission peak at around 375 nm at room temperature.

Original languageEnglish
Pages (from-to)412-416
Number of pages5
JournalJournal of Crystal Growth
Issue number2
Publication statusPublished - 2007 Oct 15

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry


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