Growth, characterization, and polarity identification of (0001) Zn 1-x Mgx O epitaxial films on lattice-matched Β-LiGa O2 (001) substrates

Wan Hsien Lin, Mitch M C Chou, Jih-Jen Wu

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7 Citations (Scopus)

Abstract

Small lattice-mismatched Β-LiGa O2 (001) substrates have been used for the epitaxial growth of (0001) Zn1-x Mgx O films using the metallorganic chemical vapor deposition method. Structure characterizations by employing X-ray diffraction and transmission electron microscope demonstrate that no MgO or Mg cluster exists throughout the Zn1-x Mgx O films. The epitaxial (0001) Zn1-x Mgx O films are successfully grown on the (001) LiGa O2 substrates with the epitaxial relationship of [0002]ZnMgO [002]LGO and [10 1- 0]ZnMgO [200]LG O. Polarity of the Zn1-x Mgx O films is determined by the convergent beam electron diffraction technique as well as wet chemical etching. Both results indicate the Zn-polarity of Zn1-x Mgx O films. The room-temperature cathodoluminescence spectra of the epitaxial (0001) Zn1-x Mgx O films show an obvious blueshift of the near-bandedge emission with increasing Mg content, suggesting a successful bandgap engineering in the epitaxial (0001) Zn1-x Mg x O films on the (001) LiGa O2 substrates.

Original languageEnglish
JournalJournal of the Electrochemical Society
Volume158
Issue number1
DOIs
Publication statusPublished - 2011 Mar 1

All Science Journal Classification (ASJC) codes

  • Electrochemistry
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Renewable Energy, Sustainability and the Environment
  • Condensed Matter Physics

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