Growth, characterization, and polarity identification of (0001) Zn 1-x Mgx O epitaxial films on lattice-matched Β-LiGa O2 (001) substrates

Wan Hsien Lin; Mitch M C Chou; Jih-Jen Wu

doi:10.1149/1.3514622

Growth, characterization, and polarity identification of (0001) Zn 1-x Mgx O epitaxial films on lattice-matched Β-LiGa O2 (001) substrates

Wan Hsien Lin, Mitch M C Chou, Jih-Jen Wu

Department of Chemical Engineering

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Small lattice-mismatched Β-LiGa O₂ (001) substrates have been used for the epitaxial growth of (0001) Zn_1-x Mg_x O films using the metallorganic chemical vapor deposition method. Structure characterizations by employing X-ray diffraction and transmission electron microscope demonstrate that no MgO or Mg cluster exists throughout the Zn1-x Mg_x O films. The epitaxial (0001) Zn_1-x Mg_x O films are successfully grown on the (001) LiGa O₂ substrates with the epitaxial relationship of [0002]ZnMgO [002]LGO and [10 1- 0]ZnMgO [200]LG _O. Polarity of the Zn_1-x Mg_x O films is determined by the convergent beam electron diffraction technique as well as wet chemical etching. Both results indicate the Zn-polarity of Zn_1-x Mg_x O films. The room-temperature cathodoluminescence spectra of the epitaxial (0001) Zn_1-x Mg_x O films show an obvious blueshift of the near-bandedge emission with increasing Mg content, suggesting a successful bandgap engineering in the epitaxial (0001) Zn_1-x Mg _x O films on the (001) LiGa O₂ substrates.

Original language	English
Journal	Journal of the Electrochemical Society
Volume	158
Issue number	1
DOIs	https://doi.org/10.1149/1.3514622
Publication status	Published - 2011 Mar 1

All Science Journal Classification (ASJC) codes

Electrochemistry
Electronic, Optical and Magnetic Materials
Materials Chemistry
Surfaces, Coatings and Films
Renewable Energy, Sustainability and the Environment
Condensed Matter Physics

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title = "Growth, characterization, and polarity identification of (0001) Zn 1-x Mgx O epitaxial films on lattice-matched Β-LiGa O2 (001) substrates",

abstract = "Small lattice-mismatched Β-LiGa O2 (001) substrates have been used for the epitaxial growth of (0001) Zn1-x Mgx O films using the metallorganic chemical vapor deposition method. Structure characterizations by employing X-ray diffraction and transmission electron microscope demonstrate that no MgO or Mg cluster exists throughout the Zn1-x Mgx O films. The epitaxial (0001) Zn1-x Mgx O films are successfully grown on the (001) LiGa O2 substrates with the epitaxial relationship of [0002]ZnMgO [002]LGO and [10 1- 0]ZnMgO [200]LG O. Polarity of the Zn1-x Mgx O films is determined by the convergent beam electron diffraction technique as well as wet chemical etching. Both results indicate the Zn-polarity of Zn1-x Mgx O films. The room-temperature cathodoluminescence spectra of the epitaxial (0001) Zn1-x Mgx O films show an obvious blueshift of the near-bandedge emission with increasing Mg content, suggesting a successful bandgap engineering in the epitaxial (0001) Zn1-x Mg x O films on the (001) LiGa O2 substrates.",

author = "Lin, {Wan Hsien} and Chou, {Mitch M C} and Jih-Jen Wu",

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AU - Chou, Mitch M C

AU - Wu, Jih-Jen

PY - 2011/3/1

Y1 - 2011/3/1

N2 - Small lattice-mismatched Β-LiGa O2 (001) substrates have been used for the epitaxial growth of (0001) Zn1-x Mgx O films using the metallorganic chemical vapor deposition method. Structure characterizations by employing X-ray diffraction and transmission electron microscope demonstrate that no MgO or Mg cluster exists throughout the Zn1-x Mgx O films. The epitaxial (0001) Zn1-x Mgx O films are successfully grown on the (001) LiGa O2 substrates with the epitaxial relationship of [0002]ZnMgO [002]LGO and [10 1- 0]ZnMgO [200]LG O. Polarity of the Zn1-x Mgx O films is determined by the convergent beam electron diffraction technique as well as wet chemical etching. Both results indicate the Zn-polarity of Zn1-x Mgx O films. The room-temperature cathodoluminescence spectra of the epitaxial (0001) Zn1-x Mgx O films show an obvious blueshift of the near-bandedge emission with increasing Mg content, suggesting a successful bandgap engineering in the epitaxial (0001) Zn1-x Mg x O films on the (001) LiGa O2 substrates.

AB - Small lattice-mismatched Β-LiGa O2 (001) substrates have been used for the epitaxial growth of (0001) Zn1-x Mgx O films using the metallorganic chemical vapor deposition method. Structure characterizations by employing X-ray diffraction and transmission electron microscope demonstrate that no MgO or Mg cluster exists throughout the Zn1-x Mgx O films. The epitaxial (0001) Zn1-x Mgx O films are successfully grown on the (001) LiGa O2 substrates with the epitaxial relationship of [0002]ZnMgO [002]LGO and [10 1- 0]ZnMgO [200]LG O. Polarity of the Zn1-x Mgx O films is determined by the convergent beam electron diffraction technique as well as wet chemical etching. Both results indicate the Zn-polarity of Zn1-x Mgx O films. The room-temperature cathodoluminescence spectra of the epitaxial (0001) Zn1-x Mgx O films show an obvious blueshift of the near-bandedge emission with increasing Mg content, suggesting a successful bandgap engineering in the epitaxial (0001) Zn1-x Mg x O films on the (001) LiGa O2 substrates.

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