Growth of CNTs on Fe-Si catalyst prepared on Si and Al coated Si substrates

F. Y. Teng, Jyh Ming Ting, Sahendra P. Sharma, Kun Hou Liao

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

In this paper we report the effect of Al interlayers on the growth characteristics of carbon nanotubes (CNTs) using as-deposited and plasma etched Fe-Si catalyst films as the catalysts. Al interlayers having various thicknesses ranging from 2 to 42 nm were deposited on Si substrates prior to the deposition of Fe-Si catalysts. It was found that the Al interlayer diffuses into the Fe-Si catalyst during the plasma etching prior to the CNT growth, leading to the swelling and amorphization of the catalyst. This allows enhanced carbon diffusion in the catalyst and therefore a faster growth rate of the resulting CNTs. It was also found that use of an Al interlayer having a thickness of ∼3 ± 1 nm is most effective. Due to the effectiveness of this, the normally required catalyst etching is no longer needed for the growth of CNTs.

Original languageEnglish
Article number095607
JournalNanotechnology
Volume19
Issue number9
DOIs
Publication statusPublished - 2008 Feb 5

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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