Growth of diamond film by a plug-flow flat flame method

Franklin Chau Nan Hong, Hon Ming Chang, Jing Chuang Hsieh, Jen Haw Hwang, Jih Jen Wu

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

The conventional acetylene-oxygen mixture torch flame can grow diamond film at fast rates, but it suffers from problems such as small area coverage, non-uniform growth, and poor reproducibility due to the large concentration and temperature gradients. Considering the effects of momentum, heat and mass transfer in the flame, we proposed to study diamond growth by the plug-flow flat flame method. Our results indicated that, owing to the large burning velocity of the acetylene-oxygen mixture, dilution was required for resonable gas consumption. The growth of uniform diamond films by a flat flame method was successful. Dilution, however, reduced the growth rate of diamond significantly and the crystal qualities deteriorated. The effects of dilution gases were studied by comparing nitrogen and argon. Argon was more favorable for diamond growth than nitrogen. The possible reasons will be discussed.

Original languageEnglish
Pages (from-to)127-132
Number of pages6
JournalThin Solid Films
Volume212
Issue number1-2
DOIs
Publication statusPublished - 1992 May 15

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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