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Growth of diamond thin films by spiral hollow cathode plasma-assisted chemical vapor deposition
P. J. Kung,
Y. Tzeng
Institute of Microelectronics
Master Degree Program on Nano-Integrated-Circuit Engineering
Research output
:
Contribution to journal
›
Article
›
peer-review
5
Citations (Scopus)
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Physics & Astronomy
hollow cathodes
100%
diamonds
68%
vapor deposition
65%
thin films
43%
gas pressure
40%
plotting
25%
electron plasma
23%
surface treatment
22%
infrared absorption
21%
methylidyne
21%
high energy electrons
21%
Auger spectroscopy
21%
gas mixtures
20%
absorption spectroscopy
19%
methane
19%
deposits
19%
infrared spectroscopy
19%
crystallites
18%
x ray diffraction
18%
filaments
18%
Raman spectroscopy
18%
electron diffraction
18%
cathodes
17%
direct current
16%
synthesis
15%
electron beams
15%
scanning electron microscopy
13%
composite materials
13%
temperature
12%
curves
11%
electric potential
11%