Growth of high-quality single-walled carbon nanotubes through the thermal chemical vapor deposition using co-sputtering Fe-Mo films as catalysts

Chien Chao Chiu, Chia-Yun Chen, Nyan Hwa Tai, Chuen Horng Tsai

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Synthesis of high-quality and high purity single-walled carbon nanotubes (SWNTs) on the Fe-Mo catalysts in the thermal chemical vapor deposition (CVD) process was performed. The catalysts were prepared by the co-sputtering and the multilayer pre-coating methods. Acetylene was adopted as the carbon precursor, and Fe and Mo were used as the raw materials of catalyst. Fe and Mo were co-sputtered or sputtered separately onto an Al layer, which was pre-coated onto a SiO2 substrate. After heat treatment, Fe-Mo catalytic particles with nano-size were formed on the substrate for growing SWNTs. The diameter distribution and microstructure of the SWNTs synthesized using these methods were investigated. Morphologies of the synthesized SWNTs were examined by field emission scanning electron microscope (FESEM) and the microstructure was studied using Raman scattering spectrometer and high resolution transmission electron microscope (HRTEM). Peaks of the radial breathing mode (RBM) in the Raman spectrum demonstrate that highly pure SWNTs had been synthesized when the co-sputtered Fe-Mo catalysts were used.

Original languageEnglish
Pages (from-to)3199-3202
Number of pages4
JournalSurface and Coatings Technology
Volume200
Issue number10 SPEC. ISS.
DOIs
Publication statusPublished - 2006 Feb 24

Fingerprint

Single-walled carbon nanotubes (SWCN)
Sputtering
Chemical vapor deposition
sputtering
carbon nanotubes
vapor deposition
catalysts
Catalysts
Raman scattering
Electron microscopes
electron microscopes
Raman spectra
Acetylene
microstructure
Microstructure
Substrates
breathing
acetylene
Field emission
coating

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

@article{b817de54b48e47ca90d698ac96445599,
title = "Growth of high-quality single-walled carbon nanotubes through the thermal chemical vapor deposition using co-sputtering Fe-Mo films as catalysts",
abstract = "Synthesis of high-quality and high purity single-walled carbon nanotubes (SWNTs) on the Fe-Mo catalysts in the thermal chemical vapor deposition (CVD) process was performed. The catalysts were prepared by the co-sputtering and the multilayer pre-coating methods. Acetylene was adopted as the carbon precursor, and Fe and Mo were used as the raw materials of catalyst. Fe and Mo were co-sputtered or sputtered separately onto an Al layer, which was pre-coated onto a SiO2 substrate. After heat treatment, Fe-Mo catalytic particles with nano-size were formed on the substrate for growing SWNTs. The diameter distribution and microstructure of the SWNTs synthesized using these methods were investigated. Morphologies of the synthesized SWNTs were examined by field emission scanning electron microscope (FESEM) and the microstructure was studied using Raman scattering spectrometer and high resolution transmission electron microscope (HRTEM). Peaks of the radial breathing mode (RBM) in the Raman spectrum demonstrate that highly pure SWNTs had been synthesized when the co-sputtered Fe-Mo catalysts were used.",
author = "Chiu, {Chien Chao} and Chia-Yun Chen and Tai, {Nyan Hwa} and Tsai, {Chuen Horng}",
year = "2006",
month = "2",
day = "24",
doi = "10.1016/j.surfcoat.2005.07.043",
language = "English",
volume = "200",
pages = "3199--3202",
journal = "Surface and Coatings Technology",
issn = "0257-8972",
publisher = "Elsevier",
number = "10 SPEC. ISS.",

}

Growth of high-quality single-walled carbon nanotubes through the thermal chemical vapor deposition using co-sputtering Fe-Mo films as catalysts. / Chiu, Chien Chao; Chen, Chia-Yun; Tai, Nyan Hwa; Tsai, Chuen Horng.

In: Surface and Coatings Technology, Vol. 200, No. 10 SPEC. ISS., 24.02.2006, p. 3199-3202.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Growth of high-quality single-walled carbon nanotubes through the thermal chemical vapor deposition using co-sputtering Fe-Mo films as catalysts

AU - Chiu, Chien Chao

AU - Chen, Chia-Yun

AU - Tai, Nyan Hwa

AU - Tsai, Chuen Horng

PY - 2006/2/24

Y1 - 2006/2/24

N2 - Synthesis of high-quality and high purity single-walled carbon nanotubes (SWNTs) on the Fe-Mo catalysts in the thermal chemical vapor deposition (CVD) process was performed. The catalysts were prepared by the co-sputtering and the multilayer pre-coating methods. Acetylene was adopted as the carbon precursor, and Fe and Mo were used as the raw materials of catalyst. Fe and Mo were co-sputtered or sputtered separately onto an Al layer, which was pre-coated onto a SiO2 substrate. After heat treatment, Fe-Mo catalytic particles with nano-size were formed on the substrate for growing SWNTs. The diameter distribution and microstructure of the SWNTs synthesized using these methods were investigated. Morphologies of the synthesized SWNTs were examined by field emission scanning electron microscope (FESEM) and the microstructure was studied using Raman scattering spectrometer and high resolution transmission electron microscope (HRTEM). Peaks of the radial breathing mode (RBM) in the Raman spectrum demonstrate that highly pure SWNTs had been synthesized when the co-sputtered Fe-Mo catalysts were used.

AB - Synthesis of high-quality and high purity single-walled carbon nanotubes (SWNTs) on the Fe-Mo catalysts in the thermal chemical vapor deposition (CVD) process was performed. The catalysts were prepared by the co-sputtering and the multilayer pre-coating methods. Acetylene was adopted as the carbon precursor, and Fe and Mo were used as the raw materials of catalyst. Fe and Mo were co-sputtered or sputtered separately onto an Al layer, which was pre-coated onto a SiO2 substrate. After heat treatment, Fe-Mo catalytic particles with nano-size were formed on the substrate for growing SWNTs. The diameter distribution and microstructure of the SWNTs synthesized using these methods were investigated. Morphologies of the synthesized SWNTs were examined by field emission scanning electron microscope (FESEM) and the microstructure was studied using Raman scattering spectrometer and high resolution transmission electron microscope (HRTEM). Peaks of the radial breathing mode (RBM) in the Raman spectrum demonstrate that highly pure SWNTs had been synthesized when the co-sputtered Fe-Mo catalysts were used.

UR - http://www.scopus.com/inward/record.url?scp=31644444318&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=31644444318&partnerID=8YFLogxK

U2 - 10.1016/j.surfcoat.2005.07.043

DO - 10.1016/j.surfcoat.2005.07.043

M3 - Article

AN - SCOPUS:31644444318

VL - 200

SP - 3199

EP - 3202

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

IS - 10 SPEC. ISS.

ER -