Growth of large-area non-polar ZnO film without constraint to substrate using oblique-angle sputtering deposition

Yi Feng Lai, Jun Han Huang, Yen Chih Chen, Chuan Pu Liu, Yaw Wen Yang

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

Non-polar ZnO thin film with high crystal quality is grown on a glass substrate using one-step oblique-angle deposition. Cross-sectional transmission electron microscopy images and selected area electron diffraction patterns reveal that the film is constructed as a stack of grains from the bottom to the top with the [0. 0. 0. 2] axis gradually titled from a vertical to a nearly horizontal orientation with respect to the substrate. The (0. 0. 0. 2) pole figure exhibits a continuous angle distribution in the ψ direction with the most concentration at approximately ψ=18° and φ= 0°. Strong anisotropic effects in local electronic structure were observed for the highly oriented ZnO surface rod by angle-dependent X-ray absorption near-edge structure measurements. The structure also exhibits polarization that depends on Raman scattering.

Original languageEnglish
Pages (from-to)1809-1814
Number of pages6
JournalJournal of the European Ceramic Society
Volume33
Issue number10
DOIs
Publication statusPublished - 2013 Sep

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry

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