Guest editorial: Theory and practice of MEMS/NEMS/MOEMS, RF MEMS, and BIOMEMS

Research output: Contribution to journalEditorialpeer-review

Original languageEnglish
Article number021101
JournalJournal of Micro/Nanolithography, MEMS, and MOEMS
Volume8
Issue number2
DOIs
Publication statusPublished - 2009

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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