TY - GEN
T1 - Hardware implementations and performance assessments of a DC magnetron sputter for enhanced depositions
AU - Liu, Cheng Tsung
AU - Chang, Chih Wen
PY - 2013
Y1 - 2013
N2 - To refine the substrate deposition results, some supplementary mechanical adjustments can be designed and implemented onto the existing DC magnetron sputters (MS). By the assistances of these attachments along with proper controls on the magnetic and electric field paths inside the vacuum chamber, results indicated that more target atoms can be sputtered and smoother depositions on the substrate surface can be achieved. Based on appropriate performance index selections, operations of the DC MS were thoroughly investigated. Selected regions on the deposited substrate surface will be probed with thickness gauge and atomic force microscopy, thus the operational performances of the DC MS with structural refinements can be assessed and the desired improvements can then be systematically validated.
AB - To refine the substrate deposition results, some supplementary mechanical adjustments can be designed and implemented onto the existing DC magnetron sputters (MS). By the assistances of these attachments along with proper controls on the magnetic and electric field paths inside the vacuum chamber, results indicated that more target atoms can be sputtered and smoother depositions on the substrate surface can be achieved. Based on appropriate performance index selections, operations of the DC MS were thoroughly investigated. Selected regions on the deposited substrate surface will be probed with thickness gauge and atomic force microscopy, thus the operational performances of the DC MS with structural refinements can be assessed and the desired improvements can then be systematically validated.
UR - http://www.scopus.com/inward/record.url?scp=84881646531&partnerID=8YFLogxK
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U2 - 10.1109/IEMDC.2013.6556338
DO - 10.1109/IEMDC.2013.6556338
M3 - Conference contribution
AN - SCOPUS:84881646531
SN - 9781467349758
T3 - Proceedings of the 2013 IEEE International Electric Machines and Drives Conference, IEMDC 2013
SP - 1477
EP - 1481
BT - Proceedings of the 2013 IEEE International Electric Machines and Drives Conference, IEMDC 2013
T2 - 2013 IEEE International Electric Machines and Drives Conference, IEMDC 2013
Y2 - 12 May 2013 through 15 May 2013
ER -