Abstract
The plasma-assisted molecular beam epitaxial (PA-MBE) growth of InN films using a double-buffer technique, was investigated. The heteroepitaxial growth of InN on Si(111) was conducted using a radio-frequency nitrogen plasma source at low temperature. The reflection high energy electron diffraction (RHEED), x-ray diffraction, Raman scattering and transmission electron microscopy (TEM) analysis were used for the study of the films. It was observed that the grown films showed strong near-infrared photoluminescence intensity at room temperature.
Original language | English |
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Pages (from-to) | 3765-3767 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 84 |
Issue number | 19 |
DOIs | |
Publication status | Published - 2004 May 10 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)