Heteroepitaxial growth of wurtzite InN films on Si(111) exhibiting strong near-infrared photoluminescence at room temperature

S. Gwo, C. L. Wu, C. H. Shen, W. H. Chang, T. M. Hsu, J. S. Wang, J. T. Hsu

Research output: Contribution to journalArticlepeer-review

131 Citations (Scopus)

Abstract

The plasma-assisted molecular beam epitaxial (PA-MBE) growth of InN films using a double-buffer technique, was investigated. The heteroepitaxial growth of InN on Si(111) was conducted using a radio-frequency nitrogen plasma source at low temperature. The reflection high energy electron diffraction (RHEED), x-ray diffraction, Raman scattering and transmission electron microscopy (TEM) analysis were used for the study of the films. It was observed that the grown films showed strong near-infrared photoluminescence intensity at room temperature.

Original languageEnglish
Pages (from-to)3765-3767
Number of pages3
JournalApplied Physics Letters
Volume84
Issue number19
DOIs
Publication statusPublished - 2004 May 10

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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