Heteroepitaxial nucleation and growth of graphene nanowalls on silicon

Chia Hao Tu, Waileong Chen, Hsin Chiao Fang, Yon-Hua Tzeng, Chuan-Pu Liu

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

Heteroepitaxial nucleation of {0 0 2} graphene sheets on {1 1 1} facets of plasma treated (1 0 0) silicon by direct-current plasma enhanced chemical vapor deposition in methane-hydrogen gas mixtures is confirmed by high-resolution transmission electron microscopy. Lattice mismatch by 12% is compensated by tilting the graphene {0 0 2} with respect to silicon {1 1 1} and matching the silicon lattice with fewer graphene layers. The interlayer spacing of graphene sheets near the silicon surface is 0.355 nm, which is larger than that of AB stacked graphite and confirmed as AA stacked graphitic phase. Subsequent growth of standing graphene nanowalls is characterized by scanning electron microscopy and Raman scattering (633 and 514 nm excitation). The Raman peaks of D-band, G-band, and 2D-band are discussed in correlation with SEM images of graphene nanowalls. A strong Raman peak corresponding to silicon-hydrogen stretch vibration is detected by 633 nm excitation at the early stage of graphene nucleation, indicating the silicon substrate etched by hydrogen plasma. With these analyses, the growth mechanism is also proposed in this paper.

Original languageEnglish
Pages (from-to)234-240
Number of pages7
JournalCarbon
Volume54
DOIs
Publication statusPublished - 2013 Apr 1

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Graphite
Silicon
Graphene
Nucleation
Hydrogen
Plasmas
Scanning electron microscopy
Lattice mismatch
Plasma enhanced chemical vapor deposition
High resolution transmission electron microscopy
Methane
Gas mixtures
Raman scattering
Substrates

All Science Journal Classification (ASJC) codes

  • Chemistry(all)

Cite this

Tu, Chia Hao ; Chen, Waileong ; Fang, Hsin Chiao ; Tzeng, Yon-Hua ; Liu, Chuan-Pu. / Heteroepitaxial nucleation and growth of graphene nanowalls on silicon. In: Carbon. 2013 ; Vol. 54. pp. 234-240.
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Heteroepitaxial nucleation and growth of graphene nanowalls on silicon. / Tu, Chia Hao; Chen, Waileong; Fang, Hsin Chiao; Tzeng, Yon-Hua; Liu, Chuan-Pu.

In: Carbon, Vol. 54, 01.04.2013, p. 234-240.

Research output: Contribution to journalArticle

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