HfSiON n-MOSFETs using low-work function HfSiχ gate

C. H. Wu, B. F. Hung, A. Chin, S. J. Wang, F. Y. Yen, Y. T. Hou, Y. Jin, H. J. Tao, S. C. Chen, M. S. Liang

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Engineering & Materials Science

Chemical Compounds