Hierarchical micro- and nanoscale structures on surfaces produced using a one-step pattern transfer process

Jie-Ren Li, Nai Ning Yin, Gang Yu Liu

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

A one-step pattern transfer process was developed to produce arrays of hierarchical micro- and nanostructures of organosilanes. The method is based on vapor deposition through polydimethylsiloxane stamps coated with close-packed nanospheres and, as such, creating hierarchical microscale and nanoscale templates, respectively. This method offers intrinsic advantages of simplicity to be used in any laboratory environment and high throughput, that is, a 1 in. wafer can be covered in 6 h. In addition, the size and geometry can be controlled via knowledge of microcontact printing and particle lithography. Finally, the approach is generic in nature and may be utilized to produce designed functionalities.

Original languageEnglish
Pages (from-to)289-294
Number of pages6
JournalJournal of Physical Chemistry Letters
Volume2
Issue number4
DOIs
Publication statusPublished - 2011 Feb 17

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

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