High efficiency light-induced dielectrophoresis biochip prepared using CVD techniques

Hung Wei Wu, Yao Sheng Huang, Hsin Ying Lee, Wu Han Tsai, Kuan Yu Chen, Li Yi Jian

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


This article describes a high-efficiency light-induced dielectrophoresis biochip containing a thin film prepared through inductively coupled plasma chemical vapor deposition (ICPCVD). The biochip comprises two ITO glass substrates and a photoconductive amorphous silicon thin film. The biochip can effectively sort particular particles (or cells) by projecting visible light onto the surface of the silicon thin film. The sorting efficiency of biochips is highly associated with the quality of the deposited amorphous silicon thin films; therefore, the choice of deposition technique is extremely critical. However, no study has examined this problem. Hence, the current study thoroughly compared the efficiency of the biochip when films produced through plasma-enhanced chemical vapor deposition and ICPCVD are used.

Original languageEnglish
Article number79
JournalBiomedical Microdevices
Issue number5
Publication statusPublished - 2016 Oct 1

All Science Journal Classification (ASJC) codes

  • Biomedical Engineering
  • Molecular Biology

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