High performance bulk acoustic resonator based on ZnO:Li piezofilms with high crystallinity and uniformity

Chun Cheng Lin, Jian Fu Tang, Sheng-Yuan Chu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This work describes a bulk acoustic resonator (BAR) based on Pt/L 0.06Z0.94O/Pt/Ti/Si structure. The L0.06Z 0.94O piezofilms are grown by radio frequency magnetron sputtering system and post-treated with ultraviolet (UV)-ozone illumination. The structural and chemical evolutions through various illumination times of the predominantly c-axis orientation LZO films are investigated. The largest piezoelectric coefficient (14.87 pC/N) of the LZO film is obtained after 120 min UV-ozone illumination, which can be ascribed to better crystallization and fewer oxygen-related defects. Furthermore, we adopt the wet chemical etching method and the lift-off process to pattern the piezofilms and electrodes of the BAR device, respectively. The fabricated resonator exhibits high quality factor (Q = 1112) at ∼500 MHz. The experimental results verify the crystallinity and the uniformity of the piezofilms play crucial roles of the BAR devices.

Original languageEnglish
Title of host publicationIEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2013
PublisherIEEE Computer Society
Pages67-69
Number of pages3
ISBN (Print)9781479933877
DOIs
Publication statusPublished - 2013 Jan 1
Event2013 IEEE 8th Nanotechnology Materials and Devices Conference, IEEE NMDC 2013 - Tainan, Taiwan
Duration: 2013 Oct 62013 Oct 9

Publication series

NameIEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2013

Other

Other2013 IEEE 8th Nanotechnology Materials and Devices Conference, IEEE NMDC 2013
CountryTaiwan
CityTainan
Period13-10-0613-10-09

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials

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