High performance GeSi quantum-well PMOS on SIMOX

D. K. Nayak, J. S. Park, J. C.S. Woo, K. L. Wang, G. K. Yabiku, K. P. MacWilliams

Research output: Chapter in Book/Report/Conference proceedingConference contribution

15 Citations (Scopus)

Abstract

A new quantum-well GeSi-SIMOX PMOSFET is presented. The device consists of a Si/Ge0.3Si0.7/Si quantum well, which is grown pseudomorphically on a SIMOX substrate. The effective channel mobility of this device has been found to be 90% higher than that of an identically processed conventional SIMOX PMOSFET.

Original languageEnglish
Title of host publication1992 International Technical Digest on Electron Devices Meeting, IEDM 1992
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages777-780
Number of pages4
ISBN (Electronic)0780308174
DOIs
Publication statusPublished - 1992
Event1992 International Technical Digest on Electron Devices Meeting, IEDM 1992 - San Francisco, United States
Duration: 1992 Dec 131992 Dec 16

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
Volume1992-December
ISSN (Print)0163-1918

Conference

Conference1992 International Technical Digest on Electron Devices Meeting, IEDM 1992
Country/TerritoryUnited States
CitySan Francisco
Period92-12-1392-12-16

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Fingerprint

Dive into the research topics of 'High performance GeSi quantum-well PMOS on SIMOX'. Together they form a unique fingerprint.

Cite this