High-performance MEMS-based gas chromatography column with integrated micro-heater

Chia Yen Lee, Lung-Ming Fu, Ting Fu Hong, Shih Chung Chen, Che Ming Chiang, Wen Cheng Kuo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A high-performance MEMS-based gas chromatography (GC) device is proposed comprising a miniature serpentine column with dimensions of 3.2 m x 200 μm x 250 μm (length x width x depth) and an integrated Pt micro-heater. The column is fabricated on a Si die measuring 3.5 x 1.8 mm2 using a wet etching process and is bonded to a Pyrex cover plate incorporating the Pt micro-heater via a thermal fusion process. The experimental results reveal that an applied voltage of 9.7 V is sufficient to maintain a constant temperature of 85oC for elution purposes. In addition, it is shown that the proposed device successfully detects the concentrations of both pure and mixed samples of four volatile organic compound (VOC) gases, namely acetone, toluene, methanol and benzene. Finally, the theoretical plate number obtained by the proposed MEMS-based GC device is shown to be 2∼3 times higher than that obtained from a conventional capillary-based GC system under the same injection conditions.

Original languageEnglish
Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
Pages190-194
Number of pages5
Publication statusPublished - 2010 Oct 18
EventSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 - Seville, Spain
Duration: 2010 May 52010 May 7

Publication series

NameSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

Other

OtherSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
CountrySpain
CitySeville
Period10-05-0510-05-07

Fingerprint

Gas chromatography
MEMS
Wet etching
Volatile organic compounds
Acetone
Toluene
Benzene
Methanol
Fusion reactions
Electric potential
Gases
Temperature
Hot Temperature

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Lee, C. Y., Fu, L-M., Hong, T. F., Chen, S. C., Chiang, C. M., & Kuo, W. C. (2010). High-performance MEMS-based gas chromatography column with integrated micro-heater. In Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 (pp. 190-194). [5486463] (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010).
Lee, Chia Yen ; Fu, Lung-Ming ; Hong, Ting Fu ; Chen, Shih Chung ; Chiang, Che Ming ; Kuo, Wen Cheng. / High-performance MEMS-based gas chromatography column with integrated micro-heater. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010. 2010. pp. 190-194 (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010).
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abstract = "A high-performance MEMS-based gas chromatography (GC) device is proposed comprising a miniature serpentine column with dimensions of 3.2 m x 200 μm x 250 μm (length x width x depth) and an integrated Pt micro-heater. The column is fabricated on a Si die measuring 3.5 x 1.8 mm2 using a wet etching process and is bonded to a Pyrex cover plate incorporating the Pt micro-heater via a thermal fusion process. The experimental results reveal that an applied voltage of 9.7 V is sufficient to maintain a constant temperature of 85oC for elution purposes. In addition, it is shown that the proposed device successfully detects the concentrations of both pure and mixed samples of four volatile organic compound (VOC) gases, namely acetone, toluene, methanol and benzene. Finally, the theoretical plate number obtained by the proposed MEMS-based GC device is shown to be 2∼3 times higher than that obtained from a conventional capillary-based GC system under the same injection conditions.",
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Lee, CY, Fu, L-M, Hong, TF, Chen, SC, Chiang, CM & Kuo, WC 2010, High-performance MEMS-based gas chromatography column with integrated micro-heater. in Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010., 5486463, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010, pp. 190-194, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010, Seville, Spain, 10-05-05.

High-performance MEMS-based gas chromatography column with integrated micro-heater. / Lee, Chia Yen; Fu, Lung-Ming; Hong, Ting Fu; Chen, Shih Chung; Chiang, Che Ming; Kuo, Wen Cheng.

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010. 2010. p. 190-194 5486463 (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Lee CY, Fu L-M, Hong TF, Chen SC, Chiang CM, Kuo WC. High-performance MEMS-based gas chromatography column with integrated micro-heater. In Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010. 2010. p. 190-194. 5486463. (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010).