TY - JOUR
T1 - High-performance stress-induced micromachined optical switch with multiswitching function using seesaw structure
AU - Kuo, Ju Nan
AU - Lee, Gwo Bin
AU - Pan, Wen Fung
PY - 2006
Y1 - 2006
N2 - In this paper, we present a high-performance electrostatically actuated optical switch with a multiswitching function using stress-induced bending micromirrors and a seesaw structure. The use of a curved polysilicon seesaw structure and a torsional beam substantially lowers the electrostatic operating voltage of the optical switch and provides a multi-switching function. Large mirror deflection angles of 15° (with a mirror elevation of 310 μm) are obtained at a low operating voltage of 17V. Furthermore, the device demonstrates a submillisecond switching time (<900 μs) and a low optical insertion loss (0.65 dB). The developed optical switch, which uses mirrors in an N × N array, could redirect 4N optical inputs to 4N outputs. The compact nature of the optical multiswitch element renders it ideal for the construction of optical crossconnects (OXCs) with a large number of ports on a chip.
AB - In this paper, we present a high-performance electrostatically actuated optical switch with a multiswitching function using stress-induced bending micromirrors and a seesaw structure. The use of a curved polysilicon seesaw structure and a torsional beam substantially lowers the electrostatic operating voltage of the optical switch and provides a multi-switching function. Large mirror deflection angles of 15° (with a mirror elevation of 310 μm) are obtained at a low operating voltage of 17V. Furthermore, the device demonstrates a submillisecond switching time (<900 μs) and a low optical insertion loss (0.65 dB). The developed optical switch, which uses mirrors in an N × N array, could redirect 4N optical inputs to 4N outputs. The compact nature of the optical multiswitch element renders it ideal for the construction of optical crossconnects (OXCs) with a large number of ports on a chip.
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U2 - 10.1143/JJAP.45.5030
DO - 10.1143/JJAP.45.5030
M3 - Article
AN - SCOPUS:33745241832
VL - 45
SP - 5030
EP - 5034
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
SN - 0021-4922
IS - 6 A
ER -