High-performance stress-induced micromachined optical switch with multiswitching function using seesaw structure

Ju Nan Kuo, Gwo Bin Lee, Wen Fung Pan

Research output: Contribution to journalArticlepeer-review

Abstract

In this paper, we present a high-performance electrostatically actuated optical switch with a multiswitching function using stress-induced bending micromirrors and a seesaw structure. The use of a curved polysilicon seesaw structure and a torsional beam substantially lowers the electrostatic operating voltage of the optical switch and provides a multi-switching function. Large mirror deflection angles of 15° (with a mirror elevation of 310 μm) are obtained at a low operating voltage of 17V. Furthermore, the device demonstrates a submillisecond switching time (<900 μs) and a low optical insertion loss (0.65 dB). The developed optical switch, which uses mirrors in an N × N array, could redirect 4N optical inputs to 4N outputs. The compact nature of the optical multiswitch element renders it ideal for the construction of optical crossconnects (OXCs) with a large number of ports on a chip.

Original languageEnglish
Pages (from-to)5030-5034
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number6 A
DOIs
Publication statusPublished - 2006 Jun 28

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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