TY - JOUR
T1 - High quality flame-deposited diamond films for IR optical windows
AU - Phillips, R.
AU - Wei, J.
AU - Tzeng, Y.
N1 - Funding Information:
This work is supported in part by the Office of Naval Research and the Alabama Research Institute. R. Phillips is a NASA graduate fellow supported by NASA Lewis Research Center. The FTIR measurements were done by Richard P. Miller, and the X-ray diffraction was performed by Tom M. Hartnett, both with Raytheon Company. Raman measurements were carried out by B. H. Loo at the University of Alabama ~n Huntsville.
PY - 1992/5/15
Y1 - 1992/5/15
N2 - The IR absorption in polycrystalline diamond films deposited in oxygen-acetylene flames was characterized using the Fourier transform IR spectroscopy (FTIR). The one-phonon absorption coefficient in the region from 7 to 12 μm that is related to extrinsic defects in the diamond films shows a strong dependence on the flame conditions as well as the substrate temperature. A high degree of diamond crystalline perfection, as judged from the undetectable one-phonon absorption, is achieved under the optimized deposition conditions for our flame set-up. This is further supported by the sharp Raman peak at 1332 cm-1 as well as the high purity in crystal orientation according to the X-ray diffraction pattern measured for the high quality diamond films. Optimal deposition conditions produce diamond films with a lower degree of secondary nucleation than is found in the lower quality diamond deposits.
AB - The IR absorption in polycrystalline diamond films deposited in oxygen-acetylene flames was characterized using the Fourier transform IR spectroscopy (FTIR). The one-phonon absorption coefficient in the region from 7 to 12 μm that is related to extrinsic defects in the diamond films shows a strong dependence on the flame conditions as well as the substrate temperature. A high degree of diamond crystalline perfection, as judged from the undetectable one-phonon absorption, is achieved under the optimized deposition conditions for our flame set-up. This is further supported by the sharp Raman peak at 1332 cm-1 as well as the high purity in crystal orientation according to the X-ray diffraction pattern measured for the high quality diamond films. Optimal deposition conditions produce diamond films with a lower degree of secondary nucleation than is found in the lower quality diamond deposits.
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U2 - 10.1016/0040-6090(92)90496-X
DO - 10.1016/0040-6090(92)90496-X
M3 - Article
AN - SCOPUS:0026866656
VL - 212
SP - 30
EP - 34
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
IS - 1-2
ER -