Abstract
The IR absorption in polycrystalline diamond films deposited in oxygen-acetylene flames was characterized using the Fourier transform IR spectroscopy (FTIR). The one-phonon absorption coefficient in the region from 7 to 12 μm that is related to extrinsic defects in the diamond films shows a strong dependence on the flame conditions as well as the substrate temperature. A high degree of diamond crystalline perfection, as judged from the undetectable one-phonon absorption, is achieved under the optimized deposition conditions for our flame set-up. This is further supported by the sharp Raman peak at 1332 cm-1 as well as the high purity in crystal orientation according to the X-ray diffraction pattern measured for the high quality diamond films. Optimal deposition conditions produce diamond films with a lower degree of secondary nucleation than is found in the lower quality diamond deposits.
Original language | English |
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Pages (from-to) | 30-34 |
Number of pages | 5 |
Journal | Thin Solid Films |
Volume | 212 |
Issue number | 1-2 |
DOIs | |
Publication status | Published - 1992 May 15 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry