High quality flame-deposited diamond films for IR optical windows

R. Phillips; J. Wei; Y. Tzeng

doi:10.1016/0040-6090(92)90496-X

High quality flame-deposited diamond films for IR optical windows

R. Phillips, J. Wei, Y. Tzeng

Institute of Microelectronics

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

The IR absorption in polycrystalline diamond films deposited in oxygen-acetylene flames was characterized using the Fourier transform IR spectroscopy (FTIR). The one-phonon absorption coefficient in the region from 7 to 12 μm that is related to extrinsic defects in the diamond films shows a strong dependence on the flame conditions as well as the substrate temperature. A high degree of diamond crystalline perfection, as judged from the undetectable one-phonon absorption, is achieved under the optimized deposition conditions for our flame set-up. This is further supported by the sharp Raman peak at 1332 cm^-1 as well as the high purity in crystal orientation according to the X-ray diffraction pattern measured for the high quality diamond films. Optimal deposition conditions produce diamond films with a lower degree of secondary nucleation than is found in the lower quality diamond deposits.

Original language	English
Pages (from-to)	30-34
Number of pages	5
Journal	Thin Solid Films
Volume	212
Issue number	1-2
DOIs	https://doi.org/10.1016/0040-6090(92)90496-X
Publication status	Published - 1992 May 15

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/0040-6090(92)90496-X

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@article{461757c5523747c3834c2213c336c945,

title = "High quality flame-deposited diamond films for IR optical windows",

abstract = "The IR absorption in polycrystalline diamond films deposited in oxygen-acetylene flames was characterized using the Fourier transform IR spectroscopy (FTIR). The one-phonon absorption coefficient in the region from 7 to 12 μm that is related to extrinsic defects in the diamond films shows a strong dependence on the flame conditions as well as the substrate temperature. A high degree of diamond crystalline perfection, as judged from the undetectable one-phonon absorption, is achieved under the optimized deposition conditions for our flame set-up. This is further supported by the sharp Raman peak at 1332 cm-1 as well as the high purity in crystal orientation according to the X-ray diffraction pattern measured for the high quality diamond films. Optimal deposition conditions produce diamond films with a lower degree of secondary nucleation than is found in the lower quality diamond deposits.",

author = "R. Phillips and J. Wei and Y. Tzeng",

note = "Funding Information: This work is supported in part by the Office of Naval Research and the Alabama Research Institute. R. Phillips is a NASA graduate fellow supported by NASA Lewis Research Center. The FTIR measurements were done by Richard P. Miller, and the X-ray diffraction was performed by Tom M. Hartnett, both with Raytheon Company. Raman measurements were carried out by B. H. Loo at the University of Alabama ~n Huntsville.",

year = "1992",

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doi = "10.1016/0040-6090(92)90496-X",

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journal = "Thin Solid Films",

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T1 - High quality flame-deposited diamond films for IR optical windows

AU - Phillips, R.

AU - Wei, J.

AU - Tzeng, Y.

N1 - Funding Information: This work is supported in part by the Office of Naval Research and the Alabama Research Institute. R. Phillips is a NASA graduate fellow supported by NASA Lewis Research Center. The FTIR measurements were done by Richard P. Miller, and the X-ray diffraction was performed by Tom M. Hartnett, both with Raytheon Company. Raman measurements were carried out by B. H. Loo at the University of Alabama ~n Huntsville.

PY - 1992/5/15

Y1 - 1992/5/15

N2 - The IR absorption in polycrystalline diamond films deposited in oxygen-acetylene flames was characterized using the Fourier transform IR spectroscopy (FTIR). The one-phonon absorption coefficient in the region from 7 to 12 μm that is related to extrinsic defects in the diamond films shows a strong dependence on the flame conditions as well as the substrate temperature. A high degree of diamond crystalline perfection, as judged from the undetectable one-phonon absorption, is achieved under the optimized deposition conditions for our flame set-up. This is further supported by the sharp Raman peak at 1332 cm-1 as well as the high purity in crystal orientation according to the X-ray diffraction pattern measured for the high quality diamond films. Optimal deposition conditions produce diamond films with a lower degree of secondary nucleation than is found in the lower quality diamond deposits.

AB - The IR absorption in polycrystalline diamond films deposited in oxygen-acetylene flames was characterized using the Fourier transform IR spectroscopy (FTIR). The one-phonon absorption coefficient in the region from 7 to 12 μm that is related to extrinsic defects in the diamond films shows a strong dependence on the flame conditions as well as the substrate temperature. A high degree of diamond crystalline perfection, as judged from the undetectable one-phonon absorption, is achieved under the optimized deposition conditions for our flame set-up. This is further supported by the sharp Raman peak at 1332 cm-1 as well as the high purity in crystal orientation according to the X-ray diffraction pattern measured for the high quality diamond films. Optimal deposition conditions produce diamond films with a lower degree of secondary nucleation than is found in the lower quality diamond deposits.

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DO - 10.1016/0040-6090(92)90496-X

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SN - 0040-6090

VL - 212

SP - 30

EP - 34

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -

High quality flame-deposited diamond films for IR optical windows

Abstract

All Science Journal Classification (ASJC) codes

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