High quality flame-deposited diamond films for IR optical windows

R. Phillips, J. Wei, Y. Tzeng

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

The IR absorption in polycrystalline diamond films deposited in oxygen-acetylene flames was characterized using the Fourier transform IR spectroscopy (FTIR). The one-phonon absorption coefficient in the region from 7 to 12 μm that is related to extrinsic defects in the diamond films shows a strong dependence on the flame conditions as well as the substrate temperature. A high degree of diamond crystalline perfection, as judged from the undetectable one-phonon absorption, is achieved under the optimized deposition conditions for our flame set-up. This is further supported by the sharp Raman peak at 1332 cm-1 as well as the high purity in crystal orientation according to the X-ray diffraction pattern measured for the high quality diamond films. Optimal deposition conditions produce diamond films with a lower degree of secondary nucleation than is found in the lower quality diamond deposits.

Original languageEnglish
Pages (from-to)30-34
Number of pages5
JournalThin Solid Films
Volume212
Issue number1-2
DOIs
Publication statusPublished - 1992 May 15

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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