High-quality strain-relaxed SiGe films grown with low temperature Si buffer

Y. H. Luo, J. Wan, R. L. Forrest, J. L. Liu, M. S. Goorsky, K. L. Wang

Research output: Contribution to journalArticlepeer-review

51 Citations (Scopus)

Fingerprint Dive into the research topics of 'High-quality strain-relaxed SiGe films grown with low temperature Si buffer'. Together they form a unique fingerprint.

Physics & Astronomy