High Quality ZnO Thin Films on InP Substrates Prepared by Radio Frequency Magnetron Sputtering. II. Surface Acoustic Wave Device Fabrication

S. J. Chang; Y. K. Su; Y. P. Shei

doi:10.1116/1.579368

High Quality ZnO Thin Films on InP Substrates Prepared by Radio Frequency Magnetron Sputtering. II. Surface Acoustic Wave Device Fabrication

S. J. Chang, Y. K. Su, Y. P. Shei

Institute of Microelectronics

Research output: Contribution to journal › Article › peer-review

53 Citations (Scopus)

Abstract

ZnO/InP based surface acoustic wave (SAW) devices were successfully fabricated. High quality ZnO films were first deposited onto InP substrates by radio frequency magnetron sputtering, and the SAW devices were fabricated on top of ZnO. It was found that the characteristics of the SAW devices depend strongly on the quality of the ZnO thin films and thus on the ZnO deposition parameters. To obtain a low loss SW device, one must have a high quality ZnO thin film. With a type I pattern, we found that the minimum insertion loss is 34 dB. Inserting counter electrodes can further reduce the insertion loss to 23 dB.

Original language	English
Pages (from-to)	385-388
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	13
Issue number	2
DOIs	https://doi.org/10.1116/1.579368
Publication status	Published - 1995 Mar

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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abstract = "ZnO/InP based surface acoustic wave (SAW) devices were successfully fabricated. High quality ZnO films were first deposited onto InP substrates by radio frequency magnetron sputtering, and the SAW devices were fabricated on top of ZnO. It was found that the characteristics of the SAW devices depend strongly on the quality of the ZnO thin films and thus on the ZnO deposition parameters. To obtain a low loss SW device, one must have a high quality ZnO thin film. With a type I pattern, we found that the minimum insertion loss is 34 dB. Inserting counter electrodes can further reduce the insertion loss to 23 dB.",

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High Quality ZnO Thin Films on InP Substrates Prepared by Radio Frequency Magnetron Sputtering. II. Surface Acoustic Wave Device Fabrication

Abstract

All Science Journal Classification (ASJC) codes

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