High-resolution three-degrees-of-freedom motion errors measuring system for a single-axis linear moving platform

H. L. Huang, C. H. Liu, W. Y. Jywe, M. S. Wang

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

In this study, a high-resolution three-degrees-of-freedom (3-DOF) motion error measuring system based on interference is described. It can simultaneously measure the linear displacement and two angular errors of a single-axis linear moving platform. The displacement is measured using a polarization interference technique and the two angular errors are also measured based on the geometry optical theorem. The verification results show that the resolution is about 20nm. The 3-DOF measurement system detected displacements relative to a measurement mirror move with an accuracy of about ±8μm for a measuring range of ± 50mm, and detected the angular errors with a related accuracy of about ± 2 arc sec for a measuring range of ± 100 arc sec.

Original languageEnglish
Pages (from-to)107-114
Number of pages8
JournalProceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
Volume223
Issue number1
DOIs
Publication statusPublished - 2009 Jan 1

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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