High-selectivity damascene chemical mechanical polishing

Shao Yu Chiu, Ying Lang Wang, Chuan Pu Liu, Shih Chieh Chang, Gwo Jen Hwang, Ming Shiann Feng, Chia Fu Chen

Research output: Contribution to journalConference articlepeer-review

32 Citations (Scopus)


Dive into the research topics of 'High-selectivity damascene chemical mechanical polishing'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds