High sensitivity ethanol gas sensor integrated with a solid-state heater and thermal isolation improvement structure for legal drink-drive limit detecting

J. J. Ho, Y. K. Fang, K. H. Wu, W. T. Hsieh, C. H. Chen, G. S. Chen, M. S. Ju, J. J. Lin, S. B. Hwang

Research output: Contribution to journalArticlepeer-review

61 Citations (Scopus)

Abstract

The paper reports the successful fabrication of ethanol gas sensors with tin-dioxide (SnO2) thin films integrated with a solid-state heater, which is realized with technologies of micro-electro-mechanical systems (MEMS), and are compatible with VLSI processes. The main sensing part with dimensions of 450 × 400 μm2 in this developed device is composed of a sensing SnO2 film, which is fabricated by electron-gun evaporation with proper annealing in ambient oxygen gas to yield fine particles and good structure. An integrated solid-state heater with a 4.5 μm-thick cantilever bridge (1000 × 500 μm2) structure is made of silicon carbide (SiC) material by MEMS technologies. The sensitivity for 1000 ppm ethanol gas reaches as high as 90 with 10 s and 2 min for the response and recovery time, respectively, at an operating temperature of 300°C. Those experimental results also exhibit a much superior performance to that of a popular commercial ethanol gas sensor TGS-822. Therefore, the developed sensor with high performance is a good candidate for some specific application in automobile to detect drink-drive limit and allows an array integration available with various films for controlling each element at separate resistance.

Original languageEnglish
Pages (from-to)227-233
Number of pages7
JournalSensors and Actuators, B: Chemical
VolumeB50
Issue number3
DOIs
Publication statusPublished - 1998

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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