High sensitivity of a ZnO nanowire-based ammonia gas sensor with Pt nano-particles

Shoou Jinn Chang, Wen Yin Weng, Cheng Liang Hsu, Ting Jen Hsueh

Research output: Contribution to journalArticlepeer-review

58 Citations (Scopus)

Abstract

We report the growth of high-density single crystalline ZnO nanowires on a patterned ZnO:Ga/SiO2/Si template, the adsorption of Pt nano-particles on the nanowire surface, and the fabrication of a ZnO nanowire-based NH3 gas sensor. It was found that the sensor responses were 22.5% and 36% for the nanowires without and with Pt adsorption when the chamber was injected with 1000 ppm of NH3 gas at 300 °C. With Pt adsorption, it was found that the measured sensitivities were around 16%, 22%, 26% and 36% when the concentration of the injected NH3 gas was 100, 200, 500 and 1000 ppm, respectively.

Original languageEnglish
Pages (from-to)283-288
Number of pages6
JournalNano Communication Networks
Volume1
Issue number4
DOIs
Publication statusPublished - 2010 Dec

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Electrical and Electronic Engineering
  • Applied Mathematics

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